...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Key Engineering Materials >A Study of Nano-lndentation Test Using Rhombus-Shaped Cantilever in Atomic Force Microscope
【24h】

A Study of Nano-lndentation Test Using Rhombus-Shaped Cantilever in Atomic Force Microscope

机译：菱形悬臂在原子力显微镜下的纳米压痕试验研究

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We have designed and fabricated diamond-shaped AFM cantilevers capable of performing multi-functioning tasks by using single crystal silicon (SCS) micromachining techniques. Structural improvement of the cantilever has clearly solved the crucial problems resulted from using conventional simple beam-AFM cantilever for mechanical testing. After force-calibration of the cantilever, indentation tests are performed to determine the mechanical behaviors in microano-scale as well as topographic imaging. A diamond Berkovich tip of which radius at the apex is approximately 20 nm is attached on the cantilever for the indentation test and 3D topography measurement. The indentation load-depth curves of nano-scale polymeric pattern (PAK01-UV curable blended resin) are measured and surface topography right after indenting is also obtained. Development of this novel cantilever will extend the AFM functionality into the highly sensitive mechanical testing devices in nano/pico scale.
机译：我们设计和制造了菱形的AFM悬臂，该悬臂能够通过使用单晶硅（SCS）微加工技术来执行多功能任务。悬臂的结构改进已明显解决了使用常规简单梁式AFM悬臂进行机械测试所导致的关键问题。在对悬臂进行力校准后，进行压痕测试以确定微观/纳米尺度的机械行为以及地形成像。尖端处的半径约为20 nm的菱形Berkovich尖端固定在悬臂上，用于压痕测试和3D形貌测量。测量纳米级聚合物图案（PAK01-UV固化共混树脂）的压痕载荷-深度曲线，并获得压痕后的表面形貌。这种新型悬臂的开发将把AFM功能扩展到纳米/皮克级的高灵敏度机械测试设备中。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号