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The Characteristic Analysis of a Piezoelectric Actuator for Valveless Micropumps

机译：无阀微型泵压电致动器的特性分析

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摘要

The behavior of a circular piezoelectric actuator for volumetric micropump has been investigated by using theoretical and finite element analyses. A modified theoretical model was developed to predict the behavior of a piezoelectric actuator induced by the applied voltage. The theoretical results for the diaphragm deflection were in good agreement with the results from numerical simulation. Based on the theoretical analysis, the effects of several important parameters on actuation performance have been investigated. These parameters include the dimensions and mechanical properties of the piezoelectric disk, bonding layer and elastic diaphragm materials. Consequently, it is thought that above theoretical model might be employed as a tool for design and optimization of the piezoelectric actuator for micropump application.
机译：通过理论和有限元分析，研究了用于容积式微型泵的圆形压电致动器的性能。开发了一种改进的理论模型来预测施加电压引起的压电致动器的行为。膜片挠度的理论结果与数值模拟结果吻合良好。在理论分析的基础上，研究了几个重要参数对驱动性能的影响。这些参数包括压电盘，粘结层和弹性膜片材料的尺寸和机械性能。因此，认为可以将上述理论模型用作用于微泵应用的压电致动器的设计和优化的工具。

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