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Development of a Micro Gyroscope using Epitaxial Polysilicon and its Performance Test

机译：外延多晶硅微陀螺的研制及其性能测试

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摘要

This paper presents a design and performance tests of in-plane gimbal-structured Z-axis gyroscope. The device is manufactured by conventional surface micro machining process using 15μm-thickness epitaxially grown polysilicon. The total size of the device is 4.8mm x 4.8mm in area including 1mm x 1mm core gyro structure and pads for wire bonding. It is designed as two-gimbaled structure which separates inner and outer gimbals. This leads two nearly identical modes of gyroscope, i.e. driving and sensing mode, to mechanically decoupled ones, resulting in enhanced performance. Experiments are accomplished through frequency analysis and dynamic tests using a detection circuit, a vacuum chamber and a rate table. Through experiments, it is confirmed that the designed gyroscope has 0.003 deg/sec resolution, 0.00095 deg/see/~(1/2)Hz noise equivalent density, 0.57 % FSO nonlinearity error and 0.02 deg/sec bias stability.
机译：本文介绍了平面万向节结构的Z轴陀螺仪的设计和性能测试。该器件是通过使用15μm厚度外延生长的多晶硅通过常规的表面微加工工艺制造的。器件的总尺寸为4.8mm x 4.8mm，包括1mm x 1mm的陀螺芯结构和用于引线键合的焊盘。它设计为两框架结构，将内部和外部万向架分开。这将陀螺仪的两种几乎相同的模式，即驱动和传感模式转换为机械解耦的模式，从而提高了性能。通过使用检测电路，真空室和速率表进行频率分析和动态测试来完成实验。通过实验证实，设计的陀螺仪具有0.003 deg / sec的分辨率，0.00095 deg / see /〜（1/2）Hz的噪声当量密度，0.57％的FSO非线性误差和0.02 deg / sec的偏置稳定性。

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