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Diamond coatings on WC-CO cutting tools using microwave plasma CVD

机译:使用微波等离子体CVD的WC-CO切削刀具上的金刚石涂层

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摘要

The quality of diamond coated WC-Co alloy tools depends on film adhesion, thermal residual stress, and film morphology. The purpose of this study is focused on the understanding of cobalt behavior during deposition, and the peeling mechanism of diamond film on WC-Co alloy substrates. It was found that micron- sied dome-like cobalt particles formed on the top of the substrate surface in the diamond nucleation stage, which resulted in non-diamond carbon deposits on the cobalt particle.
机译:金刚石涂层WC-Co合金工具的质量取决于薄膜的附着力,热残余应力和薄膜的形态。这项研究的目的在于了解沉积过程中钴的行为,以及WC-Co合金基底上金刚石膜的剥离机理。发现在金刚石成核阶段,微米级的圆顶状钴颗粒形成在基底表面的顶部,这导致了非金刚石碳沉积在钴颗粒上。

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