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首页> 外文期刊>Laser & Photonics Reviews >Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: the concept of ship-in-a-bottle biochip
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Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: the concept of ship-in-a-bottle biochip

机译：飞秒激光混合微加工技术可实现具有多尺度功能和高性能的真正3D玻璃/聚合物复合生物芯片：瓶装船用生物芯片的概念

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摘要

True three-dimensionally (3D) integrated biochips are crucial for realizing high performance biochemical analysis and cell engineering, which remain ultimate challenges. In this paper, a new method termed hybrid femtosecond laser microfabrication which consists of successive subtractive (femtosecond laser-assisted wet etching of glass) and additive (two-photon polymerization of polymer) 3D microprocessing was proposed for realizing 3D “ship-in-a-bottle” microchip. Such novel microchips were fabricated by integrating various 3D polymer microanostructures into flexible 3D glass microfluidic channels. The high quality of microchips was ensured by quantitatively investigating the experimental processes containing “line-to-line” scanning mode, improved annealing temperature (645°C), increased prebaking time (18h for 1mm-length channel), optimal laser power (1.9 times larger than that on the surface) and longer developing time (6 times larger). The ship-in-a-bottle biochips show high capabilities to provide simultaneous filtering and mixing with 87% efficiency in a shorter distance and on-chip synthesis of ZnO microflower particles.
机译：真正的三维（3D）集成生物芯片对于实现高性能生化分析和细胞工程至关重要，而这仍然是最终挑战。本文提出了一种新的混合飞秒激光微细加工方法，该方法由连续的减法（飞秒激光辅助玻璃湿法刻蚀）和添加剂（聚合物的双光子聚合）3D微处理组成，以实现3D“船入海瓶”微芯片。通过将各种3D聚合物微/纳米结构整合到柔性3D玻璃微流体通道中，制造出了这种新颖的微芯片。通过定量研究包括“线对线”扫描模式，改进的退火温度（645°C），增加的预烘焙时间（1mm长度通道为18h），最佳激光功率（1.9）的实验过程，确保了微芯片的高质量。大于表面上的2倍）和更长的显影时间（大于6倍）。瓶子装船用生物芯片具有很高的功能，可以在较短的距离内以7％的效率同时过滤和混合，并在芯片上合成ZnO微小花颗粒。

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