Nano Vibration Analyzer for Vibrational Measurement of Micro Structures

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Nano Vibration Analyzer for Vibrational Measurement of Micro Structures

机译：纳米振动分析仪，用于微结构的振动测量

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SIOS Meßtechnik GmbH presents a new fiber-coupled laserinterferome-tric vibrometer integrated in a preci-sion technical microscope. The flexible sample positioning in a wide range of 50 mm × 50 mm is achieved by the specific microscope set-up. The vibrating object can be displayed on PC by means of a USB-camera. Different objectives with magnifications of 10× and 50× are available. The laser spot diameter on the object of the 50×-objective is less than 2 μm. The microscope sys-tem is adaptable to customer speci-fications. DC deflection measure-ments as well as spectral analysis up to a frequency of 2 MHz are possible. The amplitude can be measured with a resolution in sub-nanometer range.

机译：SIOSMeßtechnikGmbH展示了一种集成在精密技术显微镜中的新型光纤耦合激光干涉振动计。通过特定的显微镜设置，可以灵活地将样品放置在50 mm×50 mm的宽范围内。振动物体可以通过USB摄像机显示在PC上。提供10倍和50倍放大率的不同物镜。 50倍物镜的目标上的激光光斑直径小于2μm。显微镜系统可适应客户要求。直流偏转测量以及高达2 MHz频率的频谱分析都是可能的。可以使用亚纳米范围内的分辨率来测量振幅。

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《Laser Magazin》 |2009年第3期|50-5084|共2页
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Nano Vibration Analyzer for Vibrational Measurement of Micro Structures

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