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Optical properties of In_2O_3 films prepared by spray pyrolysis

机译:喷雾热解法制备In_2O_3薄膜的光学性质

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摘要

In_2O_3 thin films have been deposited on glass substrates by spray pyrolysis. InCl_4 was used as the solute to prepare the starting solution with a concentration of 0.1 M. The films were grown at different substrate temperatures ranging from 300 to 400℃. The as-grown layers were optically characterized in order to evaluate the absorption coefficient, optical band gap, refractive index, extinction coefficient and other optical parameters. The influence of substrate temperature on these parameters was reported and discussed.
机译:In_2O_3薄膜已通过喷雾热解沉积在玻璃基板上。以InCl_4为溶质制备浓度为0.1 M的起始溶液。在300〜400℃的不同衬底温度下生长薄膜。对生长的层进行光学表征,以评估吸收系数,光学带隙,折射率,消光系数和其他光学参数。报道并讨论了基板温度对这些参数的影响。

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