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Characterization of BaPbO_3 and Ba(Pb_(1―x)Bi_x)O_3 thin films

机译:BaPbO_3和Ba(Pb_(1x)Bi_x)O_3薄膜的表征

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BaPbO_3 and Ba(Pb_(1―x)Bi_x)O_3 films made from barium 2-ethylhexanoate, lead 2-ethylhexanoate and bismuth acetate were prepared by metal-organic deposition (MOD) method on Pt/Ti/SiO_2/Si substrate. The phase transition and the physical properties of these films were studied. The polycrystalline BaPbO_3 phase starts to form above 600 ℃ and the Pb-excess addition would enhance the formation of single perovskite BaPbO_3 phase. With increasing annealing temperature, the optimum sheet resistance 1.6 Ωsq~(-1) (resistivity ≈1.07 x 10~(―4) Ωcm) could be obtained at 750 ℃. However, an annealing temperature over 800 ℃ causes reactions between substrate and BaPbO_3 phase and results in sharp increase of resistance. On the other hand, the substitution of Pb by Bi in the Ba(Pb_(1-x)Bi_x)O_3 films could stabilize the perovskite phase, though the sheet resistance is raised over 10 Ω sq~(―1) at x = 0.3.
机译:通过金属有机沉积(MOD)方法在Pt / Ti / SiO_2 / Si衬底上制备了由2-乙基己酸钡,2-乙基己酸铅和乙酸铋制成的BaPbO_3和Ba(Pb_(1-x)Bi_x)O_3薄膜。研究了这些薄膜的相变和物理性质。 600℃以上开始形成多晶BaPbO_3相,过量添加Pb会促进钙钛矿BaPbO_3相的形成。随着退火温度的升高,在750℃下可获得最佳的薄膜电阻1.6Ωsq〜(-1)(电阻率≈1.07x 10〜(-4)Ωcm)。然而,超过800℃的退火温度会导致衬底与BaPbO_3相之间发生反应,并导致电阻急剧增加。另一方面,尽管在x = 0.3时,薄层电阻增加了10Ωsq〜(-1),但是Ba(Pb_(1-x)Bi_x)O_3薄膜中的Bi替代了Pb可以稳定钙钛矿相。 。

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