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首页> 外文期刊>Materials Science and Engineering >Continuous multi cycle nanoindentation studies on compositionally graded Ti_(1-x)Al_xN multilayer thin films
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Continuous multi cycle nanoindentation studies on compositionally graded Ti_(1-x)Al_xN multilayer thin films

机译：Ti_（1-x）Al_xN多层复合薄膜的连续多周期纳米压痕研究

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摘要

Two types of Compositionally Graded Multilayer (CGM) films of Ti_(1-x)Al_xN consisting of 21 layers were synthesized by reactive magnetron co-sputtering technique. The first one begins with a layer of Ti_(0.4)Al_(0.6)N from substrate and ends with TiN, whereas exactly a reverse order has been followed in the second one. As deposited CGM films are poly-crystalline with rocksalt structure similar to stoichiometric TiN. Secondary Ion Mass Spectrometry (SIMS) depth profile of the films showed the presence of 21 layers of equal thickness (50 nm) with varying aluminum content in steps. Continuous Multi Cycle (CMC) nanoindentation technique was used to analyze the failure modes of these films. Topographic examination of the indented zone revealed the presence of edge cracks inside and outside the indentation area when the load exceeds beyond 90 mN. The load-displacement profiles of CMC and single indentations exhibited the onset of pop-ins at a depth of ~200 nm.
机译：通过反应磁控共溅射技术合成了由21层组成的两种类型的Ti_（1-x）Al_xN组成梯度多层（CGM）薄膜。第一个以从衬底开始的Ti_（0.4）Al_（0.6）N层开始，以TiN结束，而第二个则恰好相反。作为沉积的CGM膜是具有类似于化学计量TiN的岩盐结构的多晶。膜的二次离子质谱（SIMS）深度分布图表明，存在21个等厚度（50 nm）的层，其中铝含量逐步变化。采用连续多周期（CMC）纳米压痕技术分析了这些薄膜的破坏模式。压痕区域的地形检查显示，当载荷超过90 mN时，压痕区域内外都存在边缘裂纹。 CMC和单个压痕的载荷-位移曲线在〜200 nm的深度处出现弹跳现象。

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  • 来源
    《Materials Science and Engineering》 |2011年第21期|p.6438-6444|共7页
  • 作者

    Feby jose; R. Ramaseshan; A.K. Balamurugan; S. Dash; A.K. Tyagi; Baldev Raj;

  • 作者单位

    Thin film and Coatings Section, Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam, 603 102 TN, India;

    Thin film and Coatings Section, Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam, 603 102 TN, India;

    Thin film and Coatings Section, Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam, 603 102 TN, India;

    Thin film and Coatings Section, Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam, 603 102 TN, India;

    Thin film and Coatings Section, Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam, 603 102 TN, India;

    Thin film and Coatings Section, Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam, 603 102 TN, India;

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  • 正文语种 eng
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  • 关键词

    X-ray diffraction; mechanical; characterization; nanoindentation; failure;

    机译：X射线衍射;机械;表征;纳米压痕失败;

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