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Investigation on methods for dealing with pile-up errors in evaluating the mechanical properties of thin metal films at sub-micron scale on hard substrates by nanoindentation technique

机译：纳米压痕技术评估硬质基材上亚微米级金属薄膜力学性能时处理堆积误差的方法研究

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摘要

Two quantitative approaches are proposed in this paper in order to deal with the significant errors produced during evaluating the mechanical properties of soft metal films on hard substrates by using nanoindention technique, which depend on calculating actual contact area (CACA: area) and correcting contact depth errors (CCDE: depth). The hardness and elastic modulus of films-only for two elastically matching systems with film thickness of about 500 nm, Au/glass-ceramic and Al/7059 glass, are then obtained by using the methods. The above parameters are also determined by the Oliver and Pharr method and the constant modulus assumption analysis (CMAA: modulus) for comparisons. In CMAA: modulus, the values are assumed to be independent of the contact area and contact depth. The results indicate that the two methods are both able to correct severe pile-up errors in the Oliver and Pharr analysis and produce a relative high accuracy.
机译：本文提出了两种定量方法，以处理使用纳米压痕技术评估硬质基材上的软金属膜的机械性能时所产生的重大误差，这取决于计算实际接触面积（CACA：面积）和校正接触深度错误（CCDE：深度）。然后，通过使用该方法获得仅两种膜厚约为500 nm的弹性匹配系统（Au /玻璃陶瓷和Al / 7059玻璃）的膜硬度和弹性模量。以上参数也通过Oliver和Pharr方法以及恒定模量假设分析（CMAA：模量）进行比较确定。在CMAA：模量中，假定值与接触面积和接触深度无关。结果表明，这两种方法都能够纠正Oliver和Pharr分析中的严重堆积错误，并且具有较高的准确度。

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