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首页> 外文期刊>Materials Science and Engineering. A, Structural Materials >Surface oxidation kinetics of Cr film by Nd-YAG laser
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Surface oxidation kinetics of Cr film by Nd-YAG laser

机译：Nd-YAG激光对Cr膜的表面氧化动力学

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摘要

Surface microstructures of Cr films by Nd-YAG laser oxidation and annealing oxidation were studied by SEM, FESEM. AFM and XRD. Cr films with different grain sizes varying from 30 to 200 nm were obtained with the change of laser parameters. The calculated activation energy is of 1.13 eV and it was less than the lattice diffusion activation energy. Fick's law and average field method was applied to simulate the laser oxidation kinetics in Cr films. The differential form of homogeneous grain growth formula at equivalent constant temperature was used to establish laser oxidation kinetics. The inverse logarithm relation between oxidation rate and laser acting time was observed when the grain sizes of film were in 100-200 nm and it complied with Wagner theory and the parabola kinetics curve. The oxidation kinetics complied with Carbrea-Mott theory when the oxide film grain sizes were less than 100 nm. Cabrera-Mott oxidation kinetics was applied to not only the grain sizes within 10 nm, but also the grain sizes up to 100 nm. This result filled up the blank in the oxidation kinetics with grains sized of 10-100 nm. These results from the laser enhanced desorption which could reach rather deeper layer in the film under laser oxidation.
机译：用SEM，FESEM研究了Nd-YAG激光氧化和退火氧化Cr膜的表面微观结构。 AFM和XRD。随着激光参数的变化，获得了具有不同晶粒度（从30至200 nm）的Cr膜。计算的活化能为1.13 eV，小于晶格扩散活化能。采用菲克定律和平均场法模拟了Cr薄膜的激光氧化动力学。利用等效温度下均匀晶粒生长公式的微分形式建立激光氧化动力学。当薄膜的晶粒尺寸在100-200 nm时，观察到氧化速率与激光作用时间成反对数关系，符合Wagner理论和抛物线动力学曲线。当氧化膜的晶粒尺寸小于100 nm时，氧化动力学符合Carbrea-Mott理论。 Cabrera-Mott氧化动力学不仅适用于10 nm内的晶粒尺寸，而且适用于100 nm以下的晶粒尺寸。该结果用10-100nm的晶粒填充了氧化动力学中的空白。这些来自激光增强的解吸作用，在激光氧化作用下，解吸作用可能会到达薄膜中更深的一层。

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