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Optical and structural properties of porous zinc oxide fabricated via electrochemical etching method

机译：电化学刻蚀法制备多孔氧化锌的光学和结构性质

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摘要

We investigated the optical and structural properties of porous zinc oxide (ZnO) thin film fabricated by ultraviolet light-assisted electrochemical etching. This fabrication process used 10wt% potassium hydroxide solution as an electrolyte. Hillock-like porous ZnO films were successfully fabricated according to the field emission scanning electron microscopy results. The cross-sectional study of the sample indicated that anisotropic-dominated etching process occurred. However, the atomic force microscopic results showed an increase in surface roughness of the sample after electrochemical etching. A resonance hump induced by the porous structure was observed in the infrared reflectance spectrum. Using theoretical modeling technique, ZnO porosification was verified, and the porosity of the sample was determined.
机译：我们研究了通过紫外光辅助电化学刻蚀制备的多孔氧化锌（ZnO）薄膜的光学和结构特性。该制造过程使用10wt％的氢氧化钾溶液作为电解质。根据场发射扫描电子显微镜结果，成功制备了Hillock型多孔ZnO薄膜。样品的横截面研究表明发生了各向异性为主的蚀刻过程。然而，原子力显微镜结果显示了电化学蚀刻后样品的表面粗糙度增加。在红外反射光谱中观察到由多孔结构引起的共振峰。使用理论建模技术，验证了ZnO的孔隙度，并确定了样品的孔隙率。

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  • 来源
    《Materials Science and Engineering》 |2013年第15期|956-959|共4页
  • 作者

    C.G. Ching; S.C. Lee; P.K. Ooi; S.S. Ng; Z. Hassan; H. Abu Hassan; M.J. Abdullah;

  • 作者单位

    Nano-Optoelectronics Research and Technology Laboratory, School of Physics. Universiti Sains Malaysia, 11800 Penang, Malaysia;

    Nano-Optoelectronics Research and Technology Laboratory, School of Physics. Universiti Sains Malaysia, 11800 Penang, Malaysia,Department of Physics, Faculty of Science, University of Malaya, 50603 Kuala Lumpur, Malaysia;

    Nano-Optoelectronics Research and Technology Laboratory, School of Physics. Universiti Sains Malaysia, 11800 Penang, Malaysia;

    Nano-Optoelectronics Research and Technology Laboratory, School of Physics. Universiti Sains Malaysia, 11800 Penang, Malaysia;

    Nano-Optoelectronics Research and Technology Laboratory, School of Physics. Universiti Sains Malaysia, 11800 Penang, Malaysia;

    Nano-Optoelectronics Research and Technology Laboratory, School of Physics. Universiti Sains Malaysia, 11800 Penang, Malaysia;

    Nano-Optoelectronics Research and Technology Laboratory, School of Physics. Universiti Sains Malaysia, 11800 Penang, Malaysia;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    Metal oxide; Porous; Infrared reflectance;

    机译：金属氧化物多孔红外反射率;

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