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首页> 外文期刊>Materials Science and Engineering >Plasma parameters of argon and argon/molecular gas mixture plasmas produced in microwave discharge
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Plasma parameters of argon and argon/molecular gas mixture plasmas produced in microwave discharge

机译：微波放电中产生的氩气和氩气/分子气体混合物等离子体的等离子体参数

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摘要

The experimental results and their analysis are presented concerning electron density and temperature of the microwave discharge plasma (power range 100-500 W) produced in Ar gas and Ar-N_2 and Ar-N2-NO gas mixture at the total pressure of 0.5 Torr. The triple probe method was primarily used in order to set-up a direct and on-time technique to measure electron temperature in complex plasma. The results were compared with those obtained using a cylindrical probe mounted in a circuit with reference electrode. Each probe was made of tungsten wires of 0.5 mm diameter and 3 mm in length each. When plasma contains only one maxwellian group of electrons, within the experimental errors, both the probes systems get comparable value of plasma parameters. When the characteristic of cylindrical probe shows two groups of thermal electrons within the microwave plasma the triple probe may show always results concerning one group but of which temperature depends on the ratio of the densities of those two groups of electrons.
机译：给出了在总压力为0.5 Torr的Ar气体和Ar-N_2和Ar-N2-NO气体混合物中产生的微波放电等离子体（功率范围为100-500 W）的电子密度和温度的实验结果及其分析。三重探针法主要用于建立直接且准时的技术来测量复杂等离子体中的电子温度。将结果与使用安装在带有参考电极的电路中的圆柱形探针获得的结果进行比较。每个探针均由直径为0.5毫米，长度为3毫米的钨丝制成。当血浆仅包含一个麦克斯韦电子群时，在实验误差范围内，两个探针系统都可获得相当的血浆参数值。当圆柱形探针的特性显示微波等离子体中的两组热电子时，三重探针可能始终显示与一组有关的结果，但是其温度取决于这两类电子的密度比。

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