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首页> 外文期刊>Materials Science and Engineering >Fabrication Of Microheater By Laser Micro Cladding Electronic Paste
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Fabrication Of Microheater By Laser Micro Cladding Electronic Paste

机译：激光微熔覆电子膏制备微加热器

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摘要

The paper presents a direct-write technique named laser micro cladding electronic paste for rapid prototyping and manufacturing of microheaters. Microheaters (5 mm × 5 mm) have been successfully fabricated on alumina substrate. RuO_2 thick film resistor paste was used as heating material. Thermal characterization of the microheaters has been investigated. These microheaters were suitable for a maximum long-term operation temperature of 400 ℃. Cracking of the alumina substrate was observed at higher temperature. The heating and cooling rates of microheater were about 7 ℃s~(-1) and 4 ℃s~(-1), respectively. The results indicate that the microheater exhibits excellent thermal performance equivalent to those of traditional thick film screen-printed microheaters.
机译：本文提出了一种直接写入技术，称为激光微熔覆电子浆料，用于快速原型化和制造微加热器。微型加热器（5毫米×5毫米）已成功地制造在氧化铝基板上。将RuO_2厚膜电阻膏用作加热材料。已经研究了微加热器的热特性。这些微型加热器适用于最高长期工作温度为400℃。在较高温度下观察到氧化铝基材的破裂。微型加热器的加热和冷却速率分别约为7℃〜（-1）和4℃〜（-1）。结果表明，该微型加热器具有与传统厚膜丝网印刷微型加热器相同的优异热性能。

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