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X-ray photoelectron spectroscopy investigation of Ta/CoFeB/TaO_x heterostructures

机译：X射线光电子体光谱研究TA / COFEB / TAO_X异质结构

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In-depth understanding of structural and magnetic property correlation in technologically important heavy metal/ferromagnet/oxide heterostructures is of great interest due to its potential applications in magnetic-memory devices. Here, we investigate the structural and magnetic properties of the as-deposited and annealed ultrathin Ta/CoFeB/TaO_X stack in which zero field magnetization switching, reasonably large Dzyaloshinskii-Moriya interaction and stabilization of skyrmions has been reported in recent time. Interestingly, nearly two times increase in the saturation magnetization and a reduction in average surface roughness by half is observed in 300 °C annealed film stack in comparison to the as-deposited film. To get further insight into the mechanism resulting in such drastic change in saturation magnetization, surface sensitive X-ray photoelectron spectroscopy has been used. In the annealed film stack, the analysis of Ta peaks revealed that B has intermixed with Ta layers thus forming new chemical state TaB. Additionally, annealing caused Boron diffusion out of CoFeB layer and a subsequent exposure to atmosphere resulting in the formation of BO_X. Furthermore, the signature of metallic Fe~0 2p_(1/2) peak in Fe 2p spectra has been evidenced in the annealed film stack which plays a crucial role in increasing the saturation magnetization. We believe, these results will provide a useful insight in understanding interfacial effects which are key to application of such ultrathin film heterostructures in modern spintronics devices.
机译：深入了解技术上重要的重金属/铁磁性/氧化物异质结构在技术上重要的重金属/铁磁性/氧化异质结构具有很大的兴趣，因为其磁存储器件中的潜在应用是巨大的兴趣。在这里，近来，我们研究了沉积和退火的超薄TA / CoFeB / Tao_x堆的结构和磁性特性，其中近来据报道了零场磁化切换，合理大的Dzyaloshinskii-moriya相互作用和稳定的次幂。有趣的是，与沉积的膜相比，在300℃的退火膜堆叠中观察到饱和磁化强度近两次增加了一半的平均表面粗糙度的减小。为了进一步了解导致饱和磁化强度发生这种剧烈变化的机构，已经使用了表面敏感的X射线光电子能谱。在退火的薄膜叠层中，TA峰的分析显示B已搅拌与TA层，从而形成新的化学状态标签。另外，退火导致硼扩散从CoFeB层中并随后暴露于大气暴露，导致Bo_x的形成。此外，在退火的薄膜堆叠中已经证明了Fe 2P光谱中的金属Fe〜0 2P_（1/2）峰的签名在增加饱和磁化强度时起着至关重要的作用。我们相信，这些结果将提供有益的见解，以了解界面效应，这是在现代闪光器装置中施加这种超薄薄膜异质结构的关键。

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