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Sol-gel metal oxide dielectrics for all-solution-processed electronics

机译：用于全溶液处理电子产品的溶胶-凝胶金属氧化物电介质

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摘要

Metal oxide (MOx) dielectric materials are considered to be a key element for diverse thin-film electronic systems owing to their superior electrical and mechanical properties. While the vast majority of conventional methods for processing these materials rely on vacuum-based deposition, which seriously limits their potential for practical applications, the solution-based deposition of sol-gel MOx materials can ideally reduce both material and processing costs by introducing large-area printing methods. Nonetheless, the fundamental understanding of their film-forming mechanisms and optimum device architectures is still immature, and significant efforts should be devoted to reducing both temperature and duration for MOx polycondensation and film densification. This article reviews recent advances in solution-based MOx dielectric materials, with a specific focus on the extensive categorization of their structures/compositions and on advanced approaches for realizing ultimate material properties and next-generation device platforms. We expect that this review will manifest the strong potentials of sol-gel MOx dielectric materials toward all-solution-processed low-voltage transparent electronics with freedom in mechanical form factors along with unrivaled performance.
机译：金属氧化物（MOx）介电材料由于其优越的电气和机械性能，被认为是各种薄膜电子系统的关键元素。尽管绝大多数处理这些材料的常规方法都依赖于基于真空的沉积，这严重限制了它们在实际应用中的潜力，但溶胶-凝胶MOx材料的基于溶液的沉积可通过引入大体积的硅来理想地降低材料和加工成本。区域打印方法。尽管如此，对其成膜机理和最佳器件结构的基本了解仍不成熟，应致力于降低MOx缩聚和膜致密化的温度和持续时间。本文回顾了基于溶液的MOx介电材料的最新进展，特别关注它们的结构/组成的广泛分类以及实现最终材料性能和下一代设备平台的高级方法。我们希望，这项审查将显示出溶胶-凝胶MOx介电材料对全溶液处理的低压透明电子器件具有强大的潜力，并且具有机械尺寸因子的自由以及无与伦比的性能。

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  • 来源
    《Materials Science & Engineering》 |2017年第4期|1-22|共22页
  • 作者

    Sungjun Park; Chang-Hyun Kim; Won-June Lee; Sujin Sung; Myung-Han Yoon;

  • 作者单位

    School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea;

    School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea,Research Institute for Solar and Sustainable Energies, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea;

    School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea;

    School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea;

    School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    Thin-film transistors; Sol-gel metal oxides; High-k dielectrics; Flexible displays; Printed electronics;

    机译：薄膜晶体管;溶胶凝胶金属氧化物;高介电常数柔性显示器;印刷电子;

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