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Design of a Direct-drive XY Table System: Electromechanical and Dynamic Optimization

机译：直驱XY工作台系统的设计：机电和动态优化

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摘要

This paper presents the electromechanical system modeling of a direct-drive precision positioning XY table used for wire bonding. The XY table is directly driven by voice coil actuator (VCA) and therefore the equivalent circuit of VCA was built to construct the co-simulation platform of electromechanical system. By use of finite element analysis (FEA) and co-simulation method based on ADAMS and MATLAB/SIMULINK software, the spring as the key component in the decoupling mechanism was optimized and the matching law of stiffness and preload was given. The mechanical model of decoupling mechanism was then built up and the matching law was validated by theoretical analysis. The damp-spring-mass system of y-axis table further illustrated the matching law. For the complex electromechanical coupling system, the method of co-simulation could reflect the actual properties of system better compared with the oversimplified analytical model. The achieved results would be helpful to the dynamic design of the kind of manufacturing equipment and provide theoretical guidance for the control system development and testing.
机译：本文介绍了用于引线键合的直接驱动精密定位XY工作台的机电系统建模。 XY工作台由音圈致动器（VCA）直接驱动，因此建立了VCA的等效电路，以构建机电系统的协同仿真平台。利用有限元分析（FEA）和基于ADAMS和MATLAB / SIMULINK软件的协同仿真方法，优化了弹簧作为解耦机构的关键部件，并给出了刚度和预紧力的匹配规律。建立了去耦机构的力学模型，并通过理论分析验证了匹配规律。 y轴工作台的阻尼弹簧质量系统进一步说明了匹配规律。对于复杂的机电耦合系统，与过度简化的分析模型相比，协同仿真方法可以更好地反映系统的实际特性。所取得的成果将有助于该类制造设备的动态设计，并为控制系统的开发和测试提供理论指导。

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  • 来源
    《Materials science forum》 |2012年第2012期|p.813-816|共4页
  • 作者

    Z.P. Ma; X.Y. Zhao; F.J. Wang; D.W. Zhang;

  • 作者单位

    School of Mechanical Engineering, Tianjin University, Tianjin 300072, China;

    School of Mechanical Engineering, Tianjin University, Tianjin 300072, China;

    School of Mechanical Engineering, Tianjin University, Tianjin 300072, China;

    School of Mechanical Engineering, Tianjin University, Tianjin 300072, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    wire bonding; XY table; Co-simulation; decoupling mechanism; spring;

    机译：引线键合;XY工作台协同仿真;解耦机制;弹簧;

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