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Mechanism and Modeling of Contaminant Accumulation on Hot-Film Air Flow Sensor

机译：热膜空气流量传感器上污染物累积的机理和建模

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摘要

Hot-film air flow sensors are now widely applied in many industrial fields. Their accuracy can be seriously affected when there are contaminants accumulated on the sensor chip. To predict the decrease of accuracy caused by contamination, the accumulation mechanism of contaminant particles on the surface of the sensor chip is studied in this paper. The adsorption process of particle is analyzed and a theoretical model of the cumulative thickness of the particles over time is established. A test platform for the particle accumulation is built and a long-term cumulative test is conducted. According to the tests, cumulative thickness of the particles increases while the growth rate slows over time. The results of the test fit those of the theoretical model. Various factors affecting the accumulation of contaminants are analyzed. The results indicate that the cumulative thickness of the particles increases along with the increase of the particle concentration, the particle charge, and the electric field strength on the chip surface but decreases along with the increase of the particle radius. The test results also show that the electrical force is the dominant reason of particle adsorption accumulation. By decreasing the electric field strength on the sensor surface, the cumulative thickness of the particles can be effectively reduced.
机译：热膜气流传感器现已广泛应用于许多工业领域。当传感器芯片上积聚污染物时，其精度会受到严重影响。为了预测由污染引起的精度降低，本文研究了传感器芯片表面上的污染物颗粒的累积机理。分析了颗粒的吸附过程，建立了颗粒随时间的累积厚度的理论模型。建立了颗粒堆积测试平台，并进行了长期累积测试。根据测试，随着时间的流逝，颗粒的累积厚度增加，而生长速度变慢。测试结果与理论模型相符。分析了影响污染物积累的各种因素。结果表明，颗粒的累积厚度随颗粒浓度，颗粒电荷和芯片表面电场强度的增加而增加，但随颗粒半径的增加而减小。测试结果还表明，电力是颗粒吸附积累的主要原因。通过减小传感器表面上的电场强度，可以有效地减小颗粒的累积厚度。

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  • 来源
    《Mathematical Problems in Engineering》 |2019年第4期|6246259.1-6246259.15|共15页
  • 作者

    Yuan Changrong; Sun Zhongsheng; Li Xiaoning;

  • 作者单位

    Nanjing Univ Sci & Technol, Sch Mech Engn, Nanjing 210094, Jiangsu, Peoples R China;

    Nanjing Univ Sci & Technol, Sch Mech Engn, Nanjing 210094, Jiangsu, Peoples R China;

    Nanjing Univ Sci & Technol, Sch Mech Engn, Nanjing 210094, Jiangsu, Peoples R China;

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