Calibration of Scanning Electron Microscopes over a Wide Range of Magnifications

著录项

• 来源
  《Measurement techniques》 |2017年第12期|1245-1249|共5页
• 作者

  Kirtaev R. V.; Kuzin A. Yu.; Maslov V. G.; Mityukhlyaev V. B.; Todua P. A.; Filippov M. N.;

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• 作者单位

  Properties Surfaces & Vacuum NITsPV, Res Ctr, Moscow, Russia|State Univ, Moscow Inst Phys & Technol, Dolgoprudnyi, Moscow Region, Russia;

  All Russia Res Inst Metrol Serv VNIIMS, Moscow, Russia;

  Properties Surfaces & Vacuum NITsPV, Res Ctr, Moscow, Russia;

  Properties Surfaces & Vacuum NITsPV, Res Ctr, Moscow, Russia;

  Properties Surfaces & Vacuum NITsPV, Res Ctr, Moscow, Russia|State Univ, Moscow Inst Phys & Technol, Dolgoprudnyi, Moscow Region, Russia;

  Properties Surfaces & Vacuum NITsPV, Res Ctr, Moscow, Russia|State Univ, Moscow Inst Phys & Technol, Dolgoprudnyi, Moscow Region, Russia|IGIC RAS, Inst Gen & Inorgan Chem, Moscow, Russia;

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• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  calibration of SEM; end gauge; step structure; traceability of calibration results;

  机译：SEM校准;端规;台阶结构;校准结果可追溯性;