ANALYTIC DESIGN OF MONITORING FACILITIES FOR INTEGRATED CIRCUIT INSPECTION

A. S. Bondarevskii; F. V. Krekoten

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ANALYTIC DESIGN OF MONITORING FACILITIES FOR INTEGRATED CIRCUIT INSPECTION

机译：集成电路检查监控设施的分析设计

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摘要

A method is proposed for the analytic design of monitoring facilities that enables one to choose the characteristics on the basis of user optimality: maximum performance in using the facilities. That method does not require any additional data over and above those that a designer normally disposes of.

机译：提出了一种用于监控设施的分析设计的方法，该方法使人们能够根据用户的最佳选择特征：使用设施时的最大性能。除了设计人员通常处理的数据之外，该方法不需要任何其他数据。

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来源
《Measurement techniques》 |2009年第1期|16-19|共4页
作者
A. S. Bondarevskii; F. V. Krekoten;
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作者单位

Angstrem-M OAO, Moscow, Russia;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类
关键词
analytic design; integrated circuit monitoring; target function; mathematical model; optimization;

机译：分析设计;集成电路监控;目标功能数学模型;优化;

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机译：a. W. a.微电子设备制造集成电路设计简介

ANALYTIC DESIGN OF MONITORING FACILITIES FOR INTEGRATED CIRCUIT INSPECTION

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