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An adjustable pre-stress based sensitivity enhancement scheme for cantilever-based resonant sensors

机译：基于悬臂谐振传感器的可调节预应力敏感性增强方案

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摘要

A new sensitivity enhancement scheme, mainly comprised of a harmonic oscillator and a set of magnetic material, is proposed for desirable applications in cantilever-based resonant sensors. The basic idea is to magnetically apply a pre-stress on the harmonic oscillator to achieve a larger frequency offset. The applied axial pre-stress, which varies the equivalent stiffness of the harmonic oscillator, is simulated by an adjustable magnetic force. The resonant frequency is accordingly increased with a larger offset to a certain mass or force, thus enhancing the sensitivity of the harmonic oscillator. A new pressure sensing prototype device, mainly comprised of a triple-beam tuning fork (TBTF), a pressure sensitive film, a set of magnetic and piezoelectric materials, is designed to both theoretically and experimentally verify the validity of the sensitivity enhancement scheme for cantilever-based resonant sensors. The pre-stress can be adjusted by simply applying different magnetic forces. And the sensitivity of the cantilever-based resonant sensors can be further enhanced by optimizing both the position and the magnitude of the pre-stress.
机译：提出了一种新的灵敏度增强方案，主要包括谐振振荡器和一组磁性材料，用于悬臂的谐振传感器中的期望应用。基本思想是磁力地应用于谐波振荡器的预应力以实现更大的频率偏移。通过可调节的磁力模拟改变谐波振荡器的等效刚度的施加的轴向预应力。因此，谐振频率随着一定质量或力的较大偏移而增加，从而提高了谐波振荡器的灵敏度。一种新的压力传感原型装置，主要由三梁调谐叉（TBTF），压敏膜，一组磁性和压电材料构成，设计为理论上和实验验证悬臂灵敏度增强方案的有效性基于谐振传感器。通过简单地施加不同的磁力可以调节预压力。并且通过优化预应力的位置和大小，可以进一步提高悬臂的谐振传感器的灵敏度。

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  • 来源
    《Mechanical systems and signal processing》 |2021年第1期|107002.1-107002.14|共14页
  • 作者

    Ziqi Zhao; Dong F. Wang; Xueqiao Lou; Takahito Ono; Toshihiro Itoh;

  • 作者单位

    Micro Engineering and Micro Systems Laboratory (JML) School of Mechanical and Aerospace Engineering Jilin University Changchun 130025 China;

    Micro Engineering and Micro Systems Laboratory (JML) School of Mechanical and Aerospace Engineering Jilin University Changchun 130025 China Research Center for Ubiquitous MEMS and Micro Engineering National Institute of Advanced Industrial Science and Technology Tsukuba 305-8564 Japan;

    Micro Engineering and Micro Systems Laboratory (JML) School of Mechanical and Aerospace Engineering Jilin University Changchun 130025 China;

    Department of Mechanical Systems and Design Tohoku University Sendai 980-8579 Japan;

    Research Center for Ubiquitous MEMS and Micro Engineering National Institute of Advanced Industrial Science and Technology Tsukuba 305-8564 Japan Graduate School of Frontier Sciences The University of Tokyo Kashiwa 277-8563 Japan;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    Adjustable pre-stress; Sensitivity enhancement scheme; Optimal pre-stress; Cantilever-based resonant sensors; Pressure sensing prototype device;

    机译：可调预应力;灵敏度增强方案;最佳的预压力;悬臂基谐振传感器;压力传感原型设备;

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