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首页> 外文期刊>Mechanical systems and signal processing >Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing
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Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing

机译：具有分布式电极的静电耦合微观耦合微耦合高灵敏度大量传感的计算研究

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摘要

The high-order mode localization in electrostatically coupled microbeams with distributed electrodes has been theoretically investigated and then introduced in high sensitivity mass sensor. A reduced-order model of such sensor considering geometric and electrostatic non-linearity is established to analyze the complex influences of coupling strength, coupling mode and actuation forces on the coupling dynamics. The sensitivity can be increased by nearly two times comparing with the traditional sensor with full electrodes operating in third-order mode. Furthermore, the sensitivity is increased by an order of magnitude compared to that of the first-order mode. Moreover, the sensitivity can be enhanced by four orders of magnitude compared to the output metric of frequency shift per unit mass, which significantly validated the effectiveness of using high order mode localization to improve sensor performance. Finally, the effects of the driving and coupling voltages on sensitivity are investigated to avoid mode aliasing.
机译：理论上研究了具有分布式电极的静电耦合微观芯片的高阶模式定位，然后引入高灵敏度质量传感器。建立考虑几何和静电非线性的这种传感器的减少阶模型，以分析耦合强度，耦合模式和致动力对耦合动力学的复杂影响。与具有以三阶模式操作的全电极的传统传感器相比，灵敏度可以增加几乎两倍。此外，与一阶模式相比，灵敏度增加了一个数量级。此外，与每单位质量频移的输出度量相比，可以通过四个数量级增强灵敏度，这显着验证了使用高阶模式本地化以提高传感器性能的有效性。最后，研究了驱动和耦合电压对灵敏度的影响，以避免模式混叠。

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  • 来源
    《Mechanical systems and signal processing》 |2021年第9期|107781.1-107781.13|共13页
  • 作者

    Ming Lyu; Jian Zhao; Najib Kacem; Bin Tang; Pengbo Liu; Jiahao Song; Heng Zhong; Yu Huang;

  • 作者单位

    School of Automotive Engineering State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of Technology Dalian China;

    School of Automotive Engineering State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of Technology Dalian China;

    Univ. Bourgogne Franche-Comte FEMTO-ST Institute UMR 6174 CNRS/UFC/ENSMM/UTBM Department of Applied Mechanics Besancon France;

    Institute of Electronic Engineering China Academy of Engineering Physics Mianyang China;

    School of Automotive Engineering State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of Technology Dalian China;

    School of Automotive Engineering State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of Technology Dalian China;

    School of Automotive Engineering State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of Technology Dalian China;

    College of Ocean and Civil Engineering Dalian Ocean University Dalian China;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    Mass sensor; Mode localization; Higher-order; Distributed electrodes;

    机译：质量传感器;模式本地化;高阶;分布式电极;

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