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首页> 外文期刊>Mechanical systems and signal processing >Nonlinearity measurement for low-pressure encapsulated MEMS gyroscopes by transient response
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Nonlinearity measurement for low-pressure encapsulated MEMS gyroscopes by transient response

机译：瞬态响应用于低压封装MEMS陀螺仪的非线性测量

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摘要

To measure the nonlinear dynamic features of micromechanical gyroscopes, a non-parametric method based on Hilbert transform is proposed. Using a sequence of frequency stepping sinusoidal pulses as the excitation signal, a set of transient responses in the vicinity of the resonant frequency are obtained. The envelopes of the time-domain response signals are calculated by Hilbert transform. The location of the resonant frequency, as well as whether the gyroscope is working in linear or nonlinear region, can be approximately assessed from the waveform of the envelopes. In order to obtain the dynamic parameters of the gyroscope, a modified FREEVIB algorithm is designed for analyzing the free damped oscillation signals. The instantaneous amplitudes and instantaneous frequencies that extracted by Hilbert transform are further processed by singular spectrum analysis (SSA). Numerical simulation results indicate that the algorithm behaves better anti-noise performance and can be practically used for processing the experimentally sampled transient signals. Vibrating ring microgyroscopes are experimentally tested under different air pressure (10-100 Pa). From the largest response segment of the response sequences, qualification of the operation state, i.e. whether the gyroscope is working in the nonlinear region, is obtained from the envelope of the forced transient signal. Other parameters, including the Backbone, frequency response function (FRF) and Q-value curves, are calculated from the free damped oscillation signals. The results are in good agreement with those obtained by traditional frequency sweeping method.
机译：为了测量微机械陀螺仪的非线性动态特性，提出了一种基于希尔伯特变换的非参数方法。使用一系列频率步进的正弦脉冲作为激励信号，可以获得谐振频率附近的一组瞬态响应。时域响应信号的包络通过希尔伯特变换来计算。谐振频率的位置以及陀螺仪是工作在线性区域还是非线性区域，都可以从包络的波形中大致估算出来。为了获得陀螺仪的动态参数，设计了一种改进的FREEVIB算法来分析自由阻尼振荡信号。通过奇异频谱分析（SSA）对通过希尔伯特变换提取的瞬时幅度和瞬时频率进行进一步处理。数值仿真结果表明，该算法具有较好的抗噪性能，可实际用于处理实验采样的瞬态信号。振动环微陀螺仪在不同的气压（10-100 Pa）下进行了实验测试。从响应序列的最大响应段中，从强制瞬态信号的包络中获得操作状态的限定，即陀螺仪是否在非线性区域中工作。其他参数，包括主干，频率响应函数（FRF）和Q值曲线，都是从自由阻尼振荡信号中计算得出的。结果与传统扫频方法获得的结果吻合良好。

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