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Sliding-mode control combined with improved adaptive feedforward for wafer scanner

机译：滑模控制与改进的自适应前馈相结合的晶圆扫描仪

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摘要

In this paper, a sliding-mode control method combined with improved adaptive feedforward is proposed for wafer scanner to improve the tracking performance of the closed-loop system. Particularly, In addition to the inverse model, the nonlinear force ripple effect which may degrade the tracking accuracy of permanent magnet linear motor (PMLM) is considered in the proposed method. The dominant position periodicity of force ripple is determined by using the Fast Fourier Transform (FFT) analysis for experimental data and the improved feedforward control is achieved by the online recursive least-squares (RLS) estimation of the inverse model and the force ripple. The improved adaptive feedforward is given in a general form of nth-order model with force ripple effect. This proposed method is motivated by the motion controller design of the long-stroke PMLM and short-stroke voice coil motor for wafer scanner. The stability of the closed-loop control system and the convergence of the motion tracking are guaranteed by the proposed sliding-mode feedback and adaptive feedforward methods theoretically. Comparative experiments on a precision linear motion platform can verify the correctness and effectiveness of the proposed method. The experimental results show that comparing to traditional method the proposed one has better performance of rapidity and robustness, especially for high speed motion trajectory. And, the improvements on both tracking accuracy and settling time can be achieved.
机译：本文提出了一种结合改进的自适应前馈的滑模控制方法，用于晶片扫描仪，以提高闭环系统的跟踪性能。特别是，除了逆模型之外，在该方法中还考虑了非线性力波动效应，该效应会降低永磁直线电机（PMLM）的跟踪精度。力脉动的主导位置周期性是通过对实验数据进行快速傅立叶变换（FFT）分析确定的，而改进的前馈控制是通过逆模型和力脉动的在线递归最小二乘（RLS）估计实现的。改进的自适应前馈以具有力纹波效应的n阶模型的一般形式给出。该方法是由用于晶片扫描仪的长冲程PMLM和短冲程音圈电机的运动控制器设计驱动的。理论上，所提出的滑模反馈和自适应前馈方法保证了闭环控制系统的稳定性和运动跟踪的收敛性。在精密线性运动平台上的比较实验可以验证所提方法的正确性和有效性。实验结果表明，与传统方法相比，该方法具有更快的鲁棒性和鲁棒性，尤其是对于高速运动轨迹而言。并且，可以实现跟踪精度和建立时间的改进。

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  • 来源
    《Mechanical systems and signal processing》 |2018年第15期|105-116|共12页
  • 作者

    Xiaojie Li; Yiguang Wang;

  • 作者单位

    Electronic Engineering College, Heilongjiang University, No. 74 Xuefu Road, Nangang District, 750080 Harbin, Heilongjiang, China,Automation College, Harbin Engineering University, No. 145 Nantong Street, Nangang District, 150001 Harbin, Heilongjiang, China;

    Electronic Engineering College, Heilongjiang University, No. 74 Xuefu Road, Nangang District, 750080 Harbin, Heilongjiang, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Sliding-mode control; Force ripple; Adaptive feedforward; Linear motor;

    机译：滑模控制;力纹;自适应前馈直线电机;

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