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首页> 外文期刊>Mechanical systems and signal processing >A novel capacitive absolute positioning sensor based on time grating with nanometer resolution
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A novel capacitive absolute positioning sensor based on time grating with nanometer resolution

机译：基于纳米分辨率时间光栅的新型电容式绝对定位传感器

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摘要

The present work proposes a novel capacitive absolute positioning sensor based on time grating. The sensor includes a fine incremental-displacement measurement component combined with a coarse absolute-position measurement component to obtain high-resolution absolute positioning measurements. A single row type sensor was proposed to achieve fine displacement measurement, which combines the two electrode rows of a previously proposed double-row type capacitive displacement sensor based on time grating into a single row. To achieve absolute positioning measurement, the coarse measurement component is designed as a single-row type displacement sensor employing a single spatial period over the entire measurement range. In addition, this component employs a rectangular induction electrode and four groups of orthogonal discrete excitation electrodes with half-sinusoidal envelope shapes, which were formed by alternately extending the rectangular electrodes of the fine measurement component. The fine and coarse measurement components are tightly integrated to form a compact absolute positioning sensor. A prototype sensor was manufactured using printed circuit board technology for testing and optimization of the design in conjunction with simulations. Experimental results show that the prototype sensor achieves a ±300 nm measurement accuracy with a 1 nm resolution over a displacement range of 200 mm when employing error compensation. The proposed sensor is an excellent alternative to presently available long-range absolute nanometrology sensors owing to its low cost, simple structure, and ease of manufacturing.
机译：本工作提出了一种基于时间光栅的新型电容式绝对定位传感器。该传感器包括一个精细的增量位移测量组件和一个粗糙的绝对位置测量组件，以获得高分辨率的绝对位置测量。提出了一种单行型传感器以实现精细位移测量，该传感器将先前提出的基于时间光栅的双行型电容式位移传感器的两个电极行组合成一个单行。为了实现绝对定位测量，将粗略的测量组件设计为在整个测量范围内采用单个空间周期的单行式位移传感器。另外，该部件采用矩形感应电极和四组具有半正弦包络形状的正交离散激励电极，它们是通过交替延伸精细测量部件的矩形电极而形成的。精细和粗略的测量组件紧密集成在一起，以形成紧凑的绝对定位传感器。使用印刷电路板技术制造了原型传感器，用于结合仿真测试和优化设计。实验结果表明，采用误差补偿时，原型传感器在200 mm的位移范围内具有1 nm的分辨率，可实现±300 nm的测量精度。所提出的传感器由于其低成本，简单的结构和易于制造而成为目前可用的远程绝对纳米计量传感器的极好的替代品。

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  • 来源
    《Mechanical systems and signal processing》 |2018年第may1期|705-715|共11页
  • 作者

    Hongji Pu; Hongzhong Liu; Xiaokang Liu; Kai Peng; Zhicheng Yu;

  • 作者单位

    State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an 710049, China;

    State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an 710049, China;

    Engineering Research Center of Mechanical Testing Technology and Equipment (Ministry of Education), Chongqing University of Technology, 69 Hongguang Road, Banan District, Chongqing 400054, China;

    Engineering Research Center of Mechanical Testing Technology and Equipment (Ministry of Education), Chongqing University of Technology, 69 Hongguang Road, Banan District, Chongqing 400054, China;

    School of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, 193 Tunxi Road, Hefei 230009, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Absolute position measurement; Capacitive sensor; Time grating;

    机译：绝对位置测量;电容传感器时间光栅;

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