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Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency

机译：低频高灵敏度应力集中式MEMS矢量水听器的设计与优化

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摘要

A micro hydrophone based on piezoresistive effect, "MEMS vector hydrophone" was developed for acoustic detection application. To improve the sensitivity of MEMS vector hydrophone at low frequency, we reported a stress centralized MEMS vector hydrophone (SCVH) mainly used in 20-500 Hz. Stress concentration area was actualized in sensitive unit of hydrophone by silicon micromachining technology. Then piezoresistors were placed in stress concentration area for better mechanical response, thereby obtaining higher sensitivity. Static analysis was done to compare the mechanical response of three different sensitive microstructure: SCVH, conventional micro-silicon four-beam vector hydrophone (CFVH) and Lollipop-shaped vector hydrophone (LVH) respectively. And fluid-structure interaction (FSI) was used to analyze the natural frequency of SCVH for ensuring the measurable bandwidth. Eventually, the calibration experiment in standing wave field was done to test the property of SCVH and verify the accuracy of simulation. The results show that the sensitivity of SCVH has nearly increased by 17.2 dB in contrast to CFVH and 7.6 dB in contrast to LVH during 20-500 Hz.
机译：开发了一种基于压阻效应的微型水听器“ MEMS矢量水听器”，用于声学检测应用。为了提高MEMS矢量水听器在低频下的灵敏度，我们报道了一种主要用于20-500 Hz的应力集中式MEMS矢量水听器（SCVH）。通过硅微加工技术在水听器的敏感单元中实现了应力集中区域。然后将压敏电阻放置在应力集中区域，以获得更好的机械响应，从而获得更高的灵敏度。进行了静态分析，以比较三种不同的敏感微结构的机械响应：SCVH，常规的微硅四波束矢量水听器（CFVH）和棒棒糖形矢量水听器（LVH）。并利用流固耦合（FSI）来分析SCVH的固有频率，以确保可测量的带宽。最后，进行了驻波场标定实验，测试了SCVH的性能，验证了仿真的准确性。结果表明，在20-500 Hz期间，与CFVH相比，SCVH的灵敏度几乎提高了17.2 dB，与LVH相比，其灵敏度提高了7.6 dB。

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  • 来源
    《Mechanical systems and signal processing》 |2018年第may1期|607-618|共12页
  • 作者

    Guojun Zhang; Junwen Ding; Wei Xu; Yuan Liu; Renxin Wang; Janjun Han; Bing Bai; Chenyang Xue; Jun Liu; Wendong Zhang;

  • 作者单位

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

    Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    MEMS vector hydrophone; Stress concentration; High sensitivity; Low-frequency response;

    机译：MEMS矢量水听器;应力集中;高灵敏度;低频响应;

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