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首页> 外文期刊>Mechanical systems and signal processing >Robust adaptive backstepping control for piezoelectric nano-manipulating systems
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Robust adaptive backstepping control for piezoelectric nano-manipulating systems

机译：压电纳米操纵系统的鲁棒自适应反推控制

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摘要

In this paper we present a systematic modeling and control approach for nano-manip-ulations of a two-dimensional PZT (piezoelectric transducer) actuated servo stage. The major control challenges associated with piezoelectric nano-manipulators typically include the nonlinear dynamics of hysteresis, model uncertainties, and various disturbances. The adverse effects of these complications will result in significant performance loss, unless effectively eliminated. The primary goal of the paper is on the ultra high precision control of such systems by handling various model uncertainties and disturbances simultaneously. To this end, a novel robust adaptive backstepping-like control approach is developed such that parametric uncertainties can be estimated adaptively while the nonlinear dynamics and external disturbances are treated as bounded disturbances for robust elimination. Meanwhile, the L_2-gain of the closed-loop system is considered, and an H_∞ optimization problem is formulated to improve the tracking accuracy. Numerical simulations and real time experiments are finally conducted, which significantly outperform conventional PID methods and achieve around 1% tracking error for circular contouring tasks.
机译：在本文中，我们提出了一种二维建模和控制方法，用于二维PZT（压电换能器）致动伺服级的纳米操纵。与压电纳米操纵器相关的主要控制挑战通常包括磁滞的非线性动力学，模型不确定性和各种干扰。除非有效消除这些并发症的不利影响，否则将导致严重的性能损失。本文的主要目标是通过同时处理各种模型不确定性和干扰来对此类系统进行超高精度控制。为此，开发了一种新颖的鲁棒的自适应反步样控制方法，使得可以自适应地估计参数不确定性，同时将非线性动力学和外部干扰视为有界干扰以进行鲁棒消除。同时，考虑了闭环系统的L_2增益，提出了H_∞优化问题以提高跟踪精度。最后进行了数值模拟和实时实验，这些实验明显优于传统的PID方法，并在圆形轮廓加工任务中实现了约1％的跟踪误差。

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