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New laser excitation method for modal analysis of microstructure

机译：一种新的激光激发法进行微观结构模态分析

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摘要

A novel impulse laser excitation technique to determine the dynamic response of micro-electro-mechanical systems (MEMS) has been investigated. During the laser excitation experiments, MEMS structures are excited by the wide-band impact force created by the laser-target interaction, and Laser Doppler Vibrometer (LDV) is introduced to measure the vibration velocity of MEMS structures. A distinguishing characteristic of the methodology is that both the excitation and measurement are non-contact, which is especially suitable for the testing of MEMS microstructures that are not easily accessible. This novel excitation method and MEMS modal analysis system are verified by experiments on various cantilever beams. The results show that the laser excitation is capable of exciting the first three modes of cantilevers.
机译：研究了一种确定微机电系统（MEMS）动态响应的新型脉冲激光激发技术。在激光激发实验中，通过激光与目标相互作用产生的宽带冲击力激发MEMS结构，并引入激光多普勒振动计（LDV）来测量MEMS结构的振动速度。该方法的一个显着特征是激励和测量都是非接触式的，这特别适合于测试不易接近的MEMS微结构。通过在各种悬臂梁上的实验验证了这种新颖的激励方法和MEMS模态分析系统。结果表明，激光激发能够激发悬臂的前三种模式。

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  • 来源
    《Mechanical systems and signal processing》 |2015年第1期|227-234|共8页
  • 作者

    Liangcai Xiong; Quansheng Zhou; You Wu; Peng Chen;

  • 作者单位

    School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China,Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China;

    School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China,Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China;

    School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;

    School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China,Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Laser impact excitation; Modal analysis; MEMS dynamics; Cantilever beam; Excitation method;

    机译：激光冲击激发;模态分析MEMS动力学;悬臂梁励磁方式;

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