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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >A New Temperature Transducer for Local Temperature Compensation for Piezoresistive 3-D Stress Sensors
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A New Temperature Transducer for Local Temperature Compensation for Piezoresistive 3-D Stress Sensors

机译：用于压阻式3D应力传感器的局部温度补偿的新型温度传感器

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摘要

In this paper, a new temperature transducer using full-circular n-type piezoresistor over (111) silicon plane is proposed as an accurate solution for local temperature compensation for piezoresistive three-dimensional (3-D) stress sensors. Analytical study, in this paper, showed that the proposed n-type full-circular piezoresisor over (111) has near-zero response under 3-D state of stress. As an experimental verification, a test device with n-type piezoresistive stress sensing elements oriented over (111) plane at 0 degrees and 90 degrees to crystallographic direction [(1) over bar 10] was microfabricated to test the capability of the proposed temperature compensator. The test device was subjected to a uniaxial load up to 50 MPa using a loading rig with four-point bending fixture. The testing was performed over a temperature range of 0-50 degrees C. The results showed that the proposed temperature transducer has a linear response to temperature excitation. The fabricated transducer is capable of accurately capturing the local temperature changes with maximum absolute error of +/- 0.8 degrees C. This compensation system is advantageous for piezoresistive stress/strain sensors, since the temperature transducer has the same thermal environment with the stress/strain-sensing rosette. Moreover, this technique does not require additional circuitry on the sensing device itself.
机译：在本文中，提出了一种在（111）硅平面上使用全圆形n型压敏电阻的新型温度传感器，作为压阻三维（3-D）应力传感器的局部温度补偿的精确解决方案。本文的分析研究表明，所提出的（111）上的n型全圆压敏电阻在3-D应力状态下具有接近零的响应。作为实验验证，对具有n型压阻应力感应元件的测试装置进行了微制造，以测试与温度方向成0度和90度的结晶方向（在棒10上与（1）呈0度和90度）。 。使用带有四点弯曲夹具的装卸装置，使测试装置承受高达50 MPa的单轴载荷。测试是在0-50摄氏度的温度范围内进行的。结果表明，提出的温度传感器对温度激励具有线性响应。所制造的传感器能​​够以+/- 0.8摄氏度的最大绝对误差准确地捕获局部温度变化。该补偿系统对于压阻应力/应变传感器非常有利，因为温度传感器具有与应力/应变相同的热环境。感应玫瑰花结。而且，该技术不需要感测设备本身上的附加电路。

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