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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Six Degrees-of-Freedom Direct-Driven Nanopositioning Stage Using Crab-Leg Flexures
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Six Degrees-of-Freedom Direct-Driven Nanopositioning Stage Using Crab-Leg Flexures

机译：使用螃蟹腿部弯曲的六个自由度直接驱动的纳米定位阶段

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摘要

This article presents a novel six degrees-of-freedom nanopositioning stage having a low-profile shape. The six degrees-of-freedom motion is achieved in a parallel configuration comprising four crab-leg flexure guide mechanisms and eight electromagnetic actuators. The crab-leg flexure can be engineered to exhibit similar stiffness levels in all the directions. The noncontact direct-drive nature of the electromagnetic actuators and the symmetric layout simplify the kinematics and result in considerably low coupling between the motion axes. For design optimization, we derived an analytical model that described the static and dynamic performances of the proposed stage using the matrix method. Then, we fabricated the stage with a stroke of 0.5 mm in the translational directions and 5 mrad in the rotational directions. The stage measured 250 mm x 250 mm x 57.4 mm. In an open-loop operation, the six-axis motions exhibited linear and repeatable performances. The maximum parasitic error was less than 1.8% of full scale. The tracking errors for the closed-loop control of the 5 Hz sinusoidal trajectory were less than 222 nm and 4.2 mu rad. The temperature elevation was 5.8 degrees C after 3 h using half of the entire power consumption. The stage was utilized for developing an autofocusing system in dynamic scanning using an optical microscope.
机译：本文介绍了一种具有低调形状的六个自由度纳米定位阶段。在包括四个螃蟹腿弯曲引导机构和八个电磁致动器的平行构造中实现了六个自由度运动。蟹腿弯曲可以设计成在所有方向上表现出类似的刚度水平。电磁致动器的非接触式直接驱动性质和对称布局简化了运动轴之间的运动学，并导致运动轴之间的相当低的耦合。对于设计优化，我们使用矩阵方法派生了描述了所提出的阶段的静态和动态性能的分析模型。然后，我们在平移方向上的行程和旋转方向上的5mm制造了0.5mm的舞台。该阶段测量250mm×250mm×57.4mm。在开环操作中，六轴运动表现出线性和可重复的性能。最大寄生误差小于满量程的1.8％。 5 Hz正弦轨迹的闭环控制的跟踪误差小于222nm和4.2μmad。 3小时后，温度升高为5.8摄氏度，使用整个功耗的一半。使用光学显微镜，利用该阶段在动态扫描中开发自动聚焦系统。

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