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An Optimized Scanning-Based AFM Fast Imaging Method

机译：基于扫描的AFM快速成像方法

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摘要

Atomic force microscopy (AFM) generally relies on a raster scanning method to obtain the sample morphology, which limits its scanning speed and application prospect. To solve this issue, this article proposes an optimized scanning-based fast imaging method to improve the scanning speed of the AFM system. More precisely, a class of novel tracking signals is constructed to achieve smooth scanning, for which the effect of the parameters is analyzed to provide a basis for trajectory optimization. The scanning performance of the proposed method is evaluated from such aspects as scanning uniformity, scanning coverage, scanning/imaging time, and imaging quality, wherein the scanning uniformity is analyzed with Hopkins statistic, while the scanning coverage is studied with the logistic regression. Based on these evaluation indexes, the scanning performance is investigated to determine the scanning parameters and generate the optimized trajectory. Moreover, a three-nearest-neighbor interpolation method is proposed to deal with the difficulty involved with nonlinear sampling imaging, which facilitates to reconstruct images with satisfactory quality. Finally, multiple convincing experiments and applications are implemented to further verify the good performance of the proposed method.
机译：原子力显微镜（AFM）通常依赖于光栅扫描方法获得样品形态，这限制了其扫描速度和应用前景。要解决此问题，本文提出了一种优化的基于扫描的快速成像方法，以提高AFM系统的扫描速度。更确切地说，构造了一类新颖的跟踪信号以实现平滑扫描，分析参数的效果以提供轨迹优化的基础。从扫描均匀性，扫描覆盖，扫描/成像时间和成像质量的这种方面评估所提出的方法的扫描性能，其中通过霍普金斯统计分析扫描均匀性，而逻辑回归研究扫描覆盖。基于这些评估索引，研究了扫描性能以确定扫描参数并生成优化的轨迹。此外，提出了一种三个最近邻的插值方法来处理非线性采样成像涉及的难度，这有利于重建具有令人满意的质量的图像。最后，实施了多个令人信服的实验和应用，以进一步验证所提出的方法的良好性能。

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  • 来源
    《Mechatronics, IEEE/ASME Transactions on》 |2020年第2期|535-546|共12页
  • 作者

    Wu Yinan; Fang Yongchun; Wang Chao; Fan Zhi; Liu Cunhuan;

  • 作者单位

    Nankai Univ Inst Robot & Automat Informat Syst Tianjin 300350 Peoples R China|Nankai Univ Tianjin Key Lab Intelligent Robot Tianjin 300350 Peoples R China;

    Nankai Univ Inst Robot & Automat Informat Syst Tianjin 300350 Peoples R China|Nankai Univ Tianjin Key Lab Intelligent Robot Tianjin 300350 Peoples R China;

    Nankai Univ Inst Robot & Automat Informat Syst Tianjin 300350 Peoples R China|Nankai Univ Tianjin Key Lab Intelligent Robot Tianjin 300350 Peoples R China;

    Nankai Univ Inst Robot & Automat Informat Syst Tianjin 300350 Peoples R China|Nankai Univ Tianjin Key Lab Intelligent Robot Tianjin 300350 Peoples R China;

    Nankai Univ Inst Robot & Automat Informat Syst Tianjin 300350 Peoples R China|Nankai Univ Tianjin Key Lab Intelligent Robot Tianjin 300350 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Atomic force microscopy (AFM); fast imaging; optimized scanning; smooth curve;

    机译：原子力显微镜（AFM）;快速成像;优化扫描;平滑曲线;

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