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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Magnetically Levitated Linear Stage With Linear Bearingless Slice Hysteresis Motors
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Magnetically Levitated Linear Stage With Linear Bearingless Slice Hysteresis Motors

机译：磁悬浮的线性级，线性无轴承切片滞后电机

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摘要

This article presents the design, construction, modeling, and testing of a novel magnetically levitated linear stage using a linear bearingless slice motor design, targeting in-vacuum transportation tasks in precision manufacturing systems. The stage is driven by novel linear hysteresis motors, where the motor secondaries are made of magnetically semihard material exhibiting magnetic hysteresis. The suspension of the stage in three degrees of freedom, including vertical, pitch, and roll, is achieved passively through permanent magnet bias flux. The suspension in the lateral and yaw directions is actively controlled. This compact design effectively reduces the number of sensors and actuators needed for stabilizing the levitation. The prototype stage has been successfully levitated with a maximum thrust force of 5.8 N under 2.5-A current amplitude, which generates a stage acceleration of 1200 mm/s(2). The stage position control loop has a bandwidth of 30 Hz. The stage is tested to track a reference trajectory of the target application, and the maximum position tracking error is 50 mu m. The stage's lateral displacement during motion is below 50 mu m, which is well below making mechanical contact to the side walls. To our knowledge, this article presents the first linear bearingless slice motor design, and also the first study on linear versions of hysteresis motors.
机译：本文介绍了使用线性无轴承切片电机设计的新型磁悬浮线性阶段的设计，构造，建模和测试，瞄准真空制造系统中的真空运输任务。该阶段由新型线性滞后电动机驱动，其中电动机赋容由磁性半导体材料制成，其具有磁滞的磁滞后。通过永磁体偏置通量被动地实现三个自由度，包括垂直，间距和辊的悬浮液，包括垂直，间距和滚动。主动控制横向和横摆方向上的悬架。这种紧凑的设计有效地减少了稳定悬浮所需的传感器和执行器的数量。原型阶段已成功升高，最大推力为5.8 n为2.5级 - 电流幅度，其产生1200 mm / s（2）的阶段加速度。舞台位置控制回路具有30 Hz的带宽。测试阶段以跟踪目标应用的参考轨迹，最大位置跟踪误差为50μm。运动期间的阶段的横向位移低于50μm，差不比，下面是与侧壁的机械接触。据我们所知，本文介绍了第一款线性无轴承切片电机设计，也是滞后电机线性版本的第一研究。

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