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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Development of a Resonant Scanner to Improve the Imaging Rate of Astigmatic Optical Profilometers
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Development of a Resonant Scanner to Improve the Imaging Rate of Astigmatic Optical Profilometers

机译：开发共振扫描仪以提高散光光学轮廓计的成像速率

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摘要

An astigmatic optical profilometer provides numerous advantages such as compact size, low cost, and high resolution. In 2018, a z-axis modulation mode of the astigmatic optical profilometer was developed to realize quantitative height measurement for a surface comprising complex materials. However, the current imaging rate of the z-axis modulation mode is time-consuming. In this article, a resonant scanner was proposed to execute a high-speed z-axis scanning motion. By inducing the resonant mode, the resonant scanner enabled both a large travel range of over 87 mu m and high oscillation frequency of 1.576 kHz. Additionally, a data analysis process was proposed to calibrate the nonlinear movement of the resonant scanner. Experimental results demonstrated that the developed optical profilometer successfully captured the quantitative height and reflectivity of the complex material comprising chrome patterns on a glass substrate. Furthermore, an imaging rate of 256 s/frame was achieved, which was approximately 50 times faster than that of a previous system employing a commercial flexure-guided scanner.
机译：散光光学型仪表提供了许多优点，如紧凑尺寸，成本低，高分辨率。在2018年，开发了散光光学型仪的Z轴调制模式以实现包含复杂材料的表面的定量高度测量。然而，Z轴调制模式的当前成像速率是耗时的。在本文中，提出了一种谐振扫描仪以执行高速Z轴扫描运动。通过诱导谐振模式，谐振扫描仪使大于87μm的大型行驶范围和1.576 kHz的高振荡频率。另外，提出了一种数据分析过程以校准共振扫描仪的非线性运动。实验结果表明，发育的光学轮廓仪成功地捕获了包含在玻璃基板上的复合物材料的定量高度和反射率。此外，实现了256秒/框架的成像速率，比采用商业弯曲引导扫描仪的先前系统的成像速率大约50倍。

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