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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Static Pull-In Behavior of Hybrid Levitation Microactuators: Simulation, Modeling, and Experimental Study
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Static Pull-In Behavior of Hybrid Levitation Microactuators: Simulation, Modeling, and Experimental Study

机译：混合悬浮微致动器的静态拉动行为：仿真，建模和实验研究

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摘要

In this article, a systematic and comprehensive approach based on finite element analysis and analytical modeling for studying static pull-in phenomena in hybrid levitation microactuators is presented. A finite element model of electromagnetic levitation microactuators based on the Lagrangian formalism is formulated and developed as a result of recent progress in the analytical calculation of mutual inductance between filament loops. In particular, the developed finite element model allows us to calculate accurately and efficiently a distribution of induced eddy current within a levitated micro-object. At the same time, this fact provides a reason for formulating the analytical model in which the distribution of the induced eddy current can be approximated by one circuit represented by a circular filament. In turn, both developed models predict the static pull-in parameters of hybrid levitation microactuators without needs for solving nonlinear differential equations. The results of modeling obtained by means of the developed quasi-finite element and analytical model are verified by the comparison with experimental results.
机译：在本文中，提出了一种基于有限元分析和用于研究混合悬浮微致动器中静态拉伸现象的有限元分析和分析建模的系统和综合方法。制定了基于拉格朗日形式主义的电磁悬浮微致动力器的有限元模型，是由于灯丝环之间互感分析计算的近期进展。特别地，开发的有限元模型允许我们准确，有效地在悬浮的微对象内进行诱导涡流的分布。同时，该事实提供了制定分析模型的原因，其中诱导涡电流的分布可以近似由圆形丝表示的一个电路。反过来，两种开发模型都预测了混合悬浮微致动器的静态拉动参数，而无需求解非线性微分方程。通过与实验结果的比较验证了通过发育的准有限元和分析模型获得的建模结果。

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