Micro Ultrasonic Motor Using a Cube With a Side Length of 0.5 mm

Tomoaki Mashimo

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Micro Ultrasonic Motor Using a Cube With a Side Length of 0.5 mm

机译：微型超声波马达，使用边长为0.5mm的立方体

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Actuator miniaturization to submillimeter scales encounters difficult fabrication and serious torque dissipation caused by adhesion forces. This study presents a design for micro ultrasonic motors that enables microfabrication and motor actuation. The stator prototype, which is the smallest ultrasonic motor reported to date, comprises a metallic cube with a side length of 0.5 mm and a through-hole of 0.33-mm diameter at its center, and two piezoelectric elements adhered to its sides. Under two different applied voltages, the stator generates a driving force and transfers it to the rotor inserted in the through-hole. Performance assessments show that this micromotor generates an average angular velocity of 123 rad/s and a peak torque of 0.2 μN·m. This torque value exceeds that of the existing micromotors.

机译：致动器小型化至亚毫米刻度遇到困难的制造，并且由于粘附力而导致严重的扭矩耗散。这项研究提出了一种用于微型超声电机的设计，该设计能够实现微型制造和电机驱动。定子原型是迄今为止报道的最小的超声波电动机，它包括一个侧面长为0.5mm的金属立方体和一个中心直径为0.33mm的通孔以及两个压电元件附着在其侧面。在两个不同的施加电压下，定子产生驱动力并将其传递到插入通孔中的转子。性能评估表明，该微型电动机产生的平均角速度为123 rad / s，峰值转矩为0.2μN·m。该扭矩值超过了现有微型电动机的扭矩值。

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来源
《Mechatronics, IEEE/ASME Transactions on》 |2016年第2期|1189-1192|共4页
作者
Tomoaki Mashimo;
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作者单位

Tomoaki Mashimo is with the Electronics-inspired Interdisciplinary Research Institute, Toyohashi University of Technology, Toyohashi-city, Aichi-prefecture, 441-8580 Japan.(email:mashimo@eiiris.tut.ac.jp);

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正文语种 eng
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关键词
Microactuators; Piezoelectric actuator; micro actuators; micro robots; microfabrications; microrobots; piezoelectric actuator;

机译：微型致动器;压电致动器;微型致动器;微型机器人;微细加工;微型机器人;压电致动器;

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Micro Ultrasonic Motor Using a Cube With a Side Length of 0.5 mm

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