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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >A Twin FBG Probe and Integration With a Microhole-Measuring Machine for the Measurement of Microholes of High Aspect Ratios
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A Twin FBG Probe and Integration With a Microhole-Measuring Machine for the Measurement of Microholes of High Aspect Ratios

机译：双FBG探头，并与微孔测量仪集成在一起，用于测量高纵横比的微孔

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摘要

To enhance the precision manufacture of the microholes of high aspect ratios, a fiber Bragg grating (FBG) probe with a twin fiber structure based on capillary-driven self-assembly fabrication method is developed for a micro-hole-measuring machine to do the high-precision measurement. The sensing principle of the twin FBG probe is investigated through analyzing the strain distribution within the probe under an axial or radial contact displacement. Then, the design and fabrication method of the twin FBG probe is demonstrated. To improve the accuracy of the measurement, both data processing method and measuring method are proposed. A data processing method for acquiring the triggering position with the transformation of the signal domain and multiple fitting is implemented to raise the accuracy of the triggering position. And a method for measuring the diameter of a microhole with perpendicular bisector of the chords and dichotomization scanning is utilized to enhance the determination accuracy of the diameter. Experimental and simulation results indicate that the data processing method and measuring method are robust, and the accuracy of the measurement can be improved.
机译：为了提高高深宽比的微孔的精密制造，开发了一种基于毛细管驱动自组装制造方法的双纤维结构的光纤布拉格光栅（FBG）探针，用于微孔测量机。精度测量。通过分析轴向或径向接触位移下探针内部的应变分布，研究了双FBG探针的传感原理。然后，说明了双FBG探针的设计和制造方法。为了提高测量精度，提出了数据处理方法和测量方法。为了提高触发位置的精度，实现了一种通过信号域变换和多次拟合获取触发位置的数据处理方法。并且，利用一种用于测量弦的垂直二等分线和二分法扫描的微孔的直径的方法来提高直径的确定精度。实验和仿真结果表明，该数据处理方法和测量方法是鲁棒的，并且可以提高测量的准确性。

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