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首页> 外文期刊>IEEE / ASME Transactions on Mechatronics >Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning
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Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning

机译：双探头AFM系统的有效倾斜角度可实现高精度扫描

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摘要

Because of the everlasting promotion of microanofabrication techniques, the measurement of the feature contour of microanofabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument that has been frequently used in measuring of microanofabricated structures. However, most conventional AFM systems use a single probe with a monotonic tilting angle to scan all kinds of sample profiles. This type of AFM design easily suffers from the so-called side wall effect, and the scanning result will induce a distortion phenomenon at the corner part. To solve this problem, a novel dual probe AFM system is proposed in this paper. A highly flexible system structure is adopted in this work to create different tilting angle of each probe. With the method developed for obtaining the appropriate tilting angle, we set up the so-called effective tilting angles under different scanning scenarios. In addition, a useful merging method has been developed to stitch together the scanning results from two different probes out of two different scanning units. For scanning a standard grating, the error of sidewall angle from the scan image decreases from 27.3% to 4.5% when our method is compared with a traditional scan. Finally, by integrating the proposed scan method with a new raster-based local scan strategy, we can achieve a high-throughput precision scan. In the scan of human blood cells, we not only can remove unnecessary scan area up to 61.04%, but also can improve sidewall distortion. A comprehensive series of experiments have been conducted to validate the scanning capability of the proposed methods on our self-developed AFM system.
机译：由于微/纳米加工技术的不断发展，微/纳米加工结构的特征轮廓的测量成为重要的问题。原子力显微镜（AFM）是一种高精度测量仪器，经常用于测量微/纳米结构。但是，大多数传统的AFM系统使用具有单调倾斜角的单个探针来扫描所有类型的样本。这种AFM设计很容易受到所谓的侧壁效应的影响，扫描结果将在拐角处引起变形现象。为了解决这个问题，本文提出了一种新型的双探针原子力显微镜系统。这项工作采用了高度灵活的系统结构，以创建每个探针不同的倾斜角度。通过开发用于获取适当倾斜角的方法，我们在不同的扫描场景下设置了所谓的有效倾斜角。另外，已经开发了一种有用的合并方法，以将来自两个不同扫描单元中的两个不同探针的扫描结果缝合在一起。对于扫描标准光栅，与传统扫描相比，扫描图像的侧壁角度误差从27.3％降低至4.5％。最后，通过将提出的扫描方法与基于光栅的新局部扫描策略相集成，我们可以实现高吞吐量的精确扫描。在人体血细胞扫描中，我们不仅可以去除不必要的扫描区域，高达61.04％，而且可以改善侧壁变形。已经进行了一系列综合实验，以验证在我们自行开发的AFM系统上所提出方法的扫描能力。

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