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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Nonlinearity Effects Reduction of an AFM Piezoelectric Tube Scanner Using MIMO MPC
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Nonlinearity Effects Reduction of an AFM Piezoelectric Tube Scanner Using MIMO MPC

机译：使用MIMO MPC减少AFM压电管扫描仪的非线性影响

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摘要

The design of a controller which compensates for the effects of creep, hysteresis, vibration, and cross-coupling in a piezoelectric tube scanner (PTS) is presented in this paper. The PTS is a key nanopositioning component installed in a commercial atomic force microscope (AFM) to perform scanning. The impediments to fast scanning due to PTS dynamics are: 1) the presence of mechanical resonances; 2) nonlinearities due to the piezoelectric characteristics; and 3) the cross-coupling effect between - and -axes in the PTS. In this paper, a multi-input multi-output model predictive control (MPC) scheme is designed to counteract the effects of creep, hysteresis, vibration, and cross-coupling in a PTS. Also, a damping compensator is included to suppress the vibration effect at its resonance frequency. The proposed controller achieves a high closed-loop bandwidth and significant damping of the resonant mode. To evaluate the performance improvement using the proposed control scheme, an experimental comparison with the existing AFM proportional-integral (PI) controller and a single-input single-output (SISO) MPC is conducted. Enhancement in the scanning speed up to 125 Hz is observed with the proposed controller.
机译：本文提出了一种控制器的设计，该控制器可补偿压电管扫描仪（PTS）中的蠕变，磁滞，振动和交叉耦合的影响。 PTS是安装在商业原子力显微镜（AFM）中以执行扫描的关键纳米定位组件。由于PTS动态的原因，导致快速扫描的障碍是：1）存在机械共振； 2）由于压电特性引起的非线性； 3）PTS中-和-轴之间的交叉耦合效应。本文设计了一种多输入多输出模型预测控制（MPC）方案，以抵消PTS中的蠕变，磁滞，振动和交叉耦合的影响。此外，还包括阻尼补偿器，以抑制其共振频率下的振动效应。所提出的控制器实现了高的闭环带宽和显着的谐振模式阻尼。为了评估使用提出的控制方案的性能改进，与现有的AFM比例积分（PI）控制器和单输入单输出（SISO）MPC进行了实验比较。使用建议的控制器，扫描速度可提高到125 Hz。

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