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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Damping and Tracking Control Schemes for Nanopositioning
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Damping and Tracking Control Schemes for Nanopositioning

机译：纳米定位的阻尼和跟踪控制方案

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摘要

Fast and accurate tracking of reference trajectories is highly desirable in many nanopositioning applications, including scanning probe microscopy. Performance in common positioning stage designs is limited by the presence of lightly damped resonances and actuator nonlinearities such as hysteresis and creep. To improve the tracking performance in such systems, several damping and tracking control schemes have been presented in the literature. In this paper, six different control schemes are presented and applied to a nanopositioning system for experimental comparison. They include schemes applying damping control in the form of positive position feedback, integral resonant control, integral force feedback, and passive shunt-damping. Also, general pole placement in the form of model reference control, as well as a control scheme requiring only a combination of a low-pass filter and an integrator, is presented. The control schemes are fixed-structure, low-order control laws, for which few results exist in the literature with regard to optimal tuning. A practical tuning procedure for obtaining good tracking performance for five of the control schemes is, therefore, presented. Experimental results show that the schemes provide similar performance, and the main differences are due to the specific implementation of each scheme.
机译：在许多纳米定位应用（包括扫描探针显微镜）中，非常需要快速准确地跟踪参考轨迹。普通定位平台设计中的性能受到轻微衰减的共振和执行器非线性（例如磁滞和蠕变）的限制。为了改善这种系统中的跟踪性能，文献中提出了几种阻尼和跟踪控制方案。本文提出了六种不同的控制方案，并将其应用于纳米定位系统进行实验比较。它们包括采用正位置反馈，积分共振控制，积分力反馈和被动分流-阻尼形式的阻尼控制方案。而且，提出了模型参考控制形式的一般极点布置，以及仅需要低通滤波器和积分器组合的控制方案。控制方案是固定结构的低阶控制律，在文献中关于最优调整的结果很少。因此，提出了用于获得五个控制方案的良好跟踪性能的实用调整程序。实验结果表明，该方案具有相似的性能，主要区别在于每种方案的具体实现。

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