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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Superconducting Noncontact Device for Precision Positioning in Cryogenic Environments
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Superconducting Noncontact Device for Precision Positioning in Cryogenic Environments

机译：在低温环境中精确定位的超导非接触装置

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摘要

In this paper, a noncontact linear positioner based on superconducting magnetic levitation for high-precision positioning has been tested under cryogenic conditions (∼20 K and ∼10 $^{-6}$Pa). The prototype is able to achieve submicrometric positioning resolution of 230 ± 30 nm RMS along a stroke of ±9 mm length with a current resolution of 15 μA, and a peak current requirement lower than ±500 mA. In addition, it was demonstrated that an open-loop control strategy could be used for positioning the moving part with the accuracy of the order of 1 μm. On the other hand, deviations of the slider position were found to be ±650 μrad for the pitch, lower than 100 μrad for the yaw, ±2000 μrad for the roll, and ±4 μm for the lateral run, all of them related to a full stroke motion. These results reveal a good performance of the device and demonstrate the potential of a new tool for applications, where high-precision positioning is required within a long range in cryogenic environments like far-infrared interferometry.
机译：在本文中，已经在低温条件下（〜20 K和〜10 $ ^ {-6} $ Pa）对基于超导磁悬浮的非接触式线性定位器进行了高精度定位。该原型能够在±9 mm长的行程上实现230±30 nm RMS的亚微米定位分辨率，电流分辨率为15μA，峰值电流要求低于±500 mA。另外，已经证明，可以使用开环控制策略来以约1μm的精度定位运动部件。另一方面，发现滑块位置的偏差对于俯仰而言为±650μrad，对于偏航而言小于100μrad，对于侧倾而言为±2000μrad，对于横向方向而言为±4μm，所有这些都与全行程运动。这些结果揭示了该设备的良好性能，并展示了一种新工具的潜力，可用于需要在低温环境（如远红外干涉仪）中长期进行高精度定位的应用中。

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