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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Experimental Investigation of Robust Motion Tracking Control for a 2-DOF Flexure-Based Mechanism
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Experimental Investigation of Robust Motion Tracking Control for a 2-DOF Flexure-Based Mechanism

机译：基于2自由度挠曲机构的鲁棒运动跟踪控制的实验研究

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摘要

The design, parameter identification and robust motion tracking control of a two degree of freedom (2-DOF) flexure-based microanomechanism are presented in this paper. In the presented compliant mechanism, the cross-axis coupling ratio is below 1% indicating excellent decoupling performance. Despite this, during motion tracking the cross coupling effect cannot be ignored. To enhance the accuracy of microanomanipulation, a laser interferometry-based sensing and measurement system is established. Nonlinearities such as creep/drift and hysteresis are present in this system, which are compensated with closed-loop control. Open-loop tracking results for a 1-DOF trajectory, with and without cross-axis coupling compensation are also presented. Robust motion tracking control is extended to support 2-DOF motion trajectories. This controller is implemented to track the desired trajectories over one and two axes of motion. Robust motion control demonstrates high precision and accurate motion tracking of the 2-DOF flexure-based mechanism. The cross-axis coupling is treated as a known disturbance and the performance of tracking 1-DOF trajectory, with and without cross-axis coupling compensation, is presented. Circular motion trajectories with radii of 10 μm, 1 μm, and 250 nm are also tracked. The experimental results presented in this paper demonstrate effective compensation of the cross-axis coupling with high precision motion tracking. The resultant 2-DOF closed-loop position tracking error in the $X$ and $Y$ axes are within ±20 nm during dynamic motion, and ±8 nm in the steady state.
机译：本文介绍了基于自由度的两个自由度（2-DOF）挠曲/纳米机制的设计，参数识别和鲁棒运动跟踪控制。在提出的柔顺机构中，横轴耦合比低于1％，表明具有出色的去耦性能。尽管如此，在运动跟踪过程中，交叉耦合效应仍不可忽略。为了提高微/纳米夹持的精度，建立了基于激光干涉术的传感和测量系统。该系统中存在非线性（例如蠕变/漂移和滞后），并通过闭环控制进行了补偿。还介绍了带有和不带有跨轴耦合补偿的1-DOF轨迹的开环跟踪结果。鲁棒的运动跟踪控制已扩展为支持2自由度运动轨迹。该控制器实现为在一个和两个运动轴上跟踪所需的轨迹。强大的运动控制证明了基于2-DOF挠曲机构的高精度和精确运动跟踪。横轴耦合被视为已知的干扰，并给出了具有和不具有横轴耦合补偿的跟踪1-DOF轨迹的性能。还跟踪半径为10μm，1μm和250 nm的圆周运动轨迹。本文提出的实验结果证明了高精度运动跟踪对横轴耦合的有效补偿。在动态运动期间，在$ X $和$ Y $轴上产生的2自由度闭环位置跟踪误差在±20 nm以内，而在稳态时则为±8 nm。

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