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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Flatness-Based Active Vibration Control for Piezoelectric Actuators
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Flatness-Based Active Vibration Control for Piezoelectric Actuators

机译：压电执行器的基于平面度的主动振动控制

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摘要

The accuracy and resolution of metrological devices (coordinate measuring machines -CMM-, interferometers, etc.) are greatly affected by their robustness to external vibrations. This is especially important in the case of micrometric and nanometric microscopes, such as atomic force microscopes (AFM). In such cases, active vibration control strategies are frequently used, requiring actuators capable of fast and accurate responses. Piezoelectric actuators meet these requirements but they suffer from two major drawbacks, hysteresis, and rate dependence, which must be taken into consideration in the design of the control strategy. The present work proposes a novel active vibration control strategy using piezoelectric actuators for metrological devices affected by low external loads. The control strategy combines a classical sky-hook feedback with a feedforward control. The effect of hysteresis is minimized by compensating the senstivity variations of the actuator in oscillatory movements. For the design of the feedforward law, the present work demonstrates that a stack piezoelectric actuator working as a damper admits a mathematical description fulfilling differential flatness. It also proposes a formulation of the active vibration damping problem in terms of a trajectory tracking command perfectly fitted to the flatness-based control law. This strategy obtains damping improvements in the entire frequency range of operation without the instability problems derived from high feedback gains.
机译：计量设备（坐标测量机-CMM-，干涉仪等）的精度和分辨率受其对外部振动的鲁棒性影响。这对于微米级和纳米级显微镜（例如原子力显微镜（AFM））尤其重要。在这种情况下，经常使用主动振动控制策略，要求执行器具有快速准确的响应能力。压电致动器可以满足这些要求，但它们具有两个主要缺点，即磁滞和速率依赖性，这在控制策略的设计中必须加以考虑。本工作提出了一种新颖的主动振动控制策略，该方法使用压电致动器来应对受低外部负载影响的计量设备。该控制策略将经典的“摘机”反馈与前馈控制相结合。通过补偿执行机构在振荡运动中的灵敏度变化，可以将磁滞效应最小化。对于前馈定律的设计，本工作表明，用作阻尼器的叠层压电致动器可以接受满足微分平坦度的数学描述。它还根据完全符合基于平面度的控制律的轨迹跟踪命令，提出了主动减振问题的表述。这种策略可在整个工作频率范围内实现阻尼改善，而不会因高反馈增益而产生不稳定性问题。

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