Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires

Stolle C.; Bartenwerfer M.; Celle C.; Simonato J.-P.; Fatikow S.

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Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires

机译：用于金属辅助刻蚀硅纳米线的处理和表征的纳米机器人策略

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摘要

This paper gives insight into nanorobotic handling and electrical characterization of silicon nanowires (SiNWs) inside a scanning electron microscope. The synthesis of metal-assisted etched both end doped SiNWs is presented. Several nanorobotic pick and place strategies for handling individual nanowires are discussed. Key approaches such as force-based and adhesive bonding (focus ion and electron beam induced deposition) have been realized experimentally and evaluated toward their suitability for automation. Preliminary results on electrical characterization are presented.

机译：本文深入介绍了扫描电子显微镜内硅纳米线（SiNWs）的纳米机器人处理和电特性。介绍了金属辅助蚀刻的两端掺杂SiNW的合成。讨论了几种处理单个纳米线的纳米机器人拾取和放置策略。已经通过实验实现了诸如基于力和粘合剂结合（聚焦离子和电子束诱导沉积）等关键方法，并对其自动化性进行了评估。提出了有关电特性的初步结果。

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来源
《Mechatronics, IEEE/ASME Transactions on》 |2013年第3期|p.887-894|共8页
作者
Stolle C.; Bartenwerfer M.; Celle C.; Simonato J.-P.; Fatikow S.;
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作者单位

Division of Microrobotics and Control Engineering, University of Oldenburg, Oldenburg, Germany;

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原文格式 PDF
正文语种 eng
中图分类
关键词
Etching; Force; Grippers; Nanowires; Silicon; Substrates; Tungsten; Electrical characterization; handling strategies; material characterization; nanorobotics; silicon-nanowires;

机译：蚀刻;力;夹爪;纳米线;硅;基材;钨;电气特性处理策略;材料表征;纳米机器人硅纳米线;

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机译：具有不同掺杂水平的金属辅助化学蚀刻金属辅助化学蚀刻形成的纳米线阵列的光声表征
2. Corrigendum to "Wet-chemically etched silicon nanowire: Effect of etching parameters on the morphology and optical characterizations" [Sol. Energy 161 (2018) 180-186] [J] . Salhi B., Hossain M. K., Al-Sulaiman F. Solar Energy . 2018,第jula期

机译：“湿化学腐蚀的硅纳米线的腐蚀勘误：腐蚀参数对形态和光学特性的影响”能源161（2018）180-186]
3. Wet-chemically etched silicon nanowire: Effect of etching parameters on the morphology and optical characterizations [J] . Salhi B., Hossain M. K., Al-Sulaiman F. Solar Energy . 2018,第feba期

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4. Fabrication and Characterization of Single-Crystal Metal-Assisted Chemically Etched Rough Si Nanowires for Lithium-ion Battery Anodes [C] . W. McSweeney, O. Lotty, J. D. Holmes, Nanostructured materials for energy storage and conversion. . 2011

机译：锂离子电池阳极单晶金属辅助化学刻蚀粗糙硅纳米线的制备与表征
5. Material characterization, patterning and adsorbate induced modulation of light emission of porous silicon produced by metal-assisted electroless etching. [D] . Chattopadhyay, Soma. 2006

机译：通过金属辅助化学蚀刻产生的多孔硅的材料表征，图案化和吸附物诱导的光调制。
6. Formation of silicon nanowire packed films from metallurgical-grade silicon powder using a two-step metal-assisted chemical etching method [O] . Rachid Ouertani, Abderrahmen Hamdi, Chohdi Amri, 2014

机译：使用两步金属辅助化学刻蚀方法由冶金级硅粉形成硅纳米线填充膜
7. Metal-Assisted chemically Etched silicon Nanowire Systems for Biochemical and Energy storage Applications [O] . ZHENG HAN 2014

机译：用于生物化学和能量存储应用的金属辅助化学蚀刻硅纳米线系统

Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires

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