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首页> 外文期刊>IEEE / ASME Transactions on Mechatronics >Closed-Loop Optimal Control-Enabled Piezoelectric Microforce Sensors
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Closed-Loop Optimal Control-Enabled Piezoelectric Microforce Sensors

机译：闭环最优控制压电微力传感器

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摘要

This paper presents a closed-loop optimally controlled force-sensing technology with applications in both micromanipulation and microassembly. The microforce-sensing technology in this paper is based on a cantilevered composite beam structure with embedded piezoelectric polyvinylidene fluoride (PVDF) actuating and sensing layers. In this type of sensor, the application of an external load causes deformation within the PVDF sensing layer. This generates a signal that is fed through a linear quadratic regulator (LQR) optimal servoed controller to the PVDF actuating layer. This in turn generates a balancing force to counteract the externally applied load. As a result, a closed feedback loop is formed, which causes the tip of this highly sensitive sensor to remain in its equilibrium position, even in the presence of dynamically applied external loads. The sensor's stiffness is virtually improved as a result of the equilibrium position whenever the control loop is active, thereby enabling accurate motion control of the sensor tip for fine micromanipulation and microassembly. Furthermore, the applied force can be determined in real time through measurement of the balance force.
机译：本文提出了一种闭环最佳控制力感测技术，并应用于微操纵和微装配。本文中的微力传感技术基于具有嵌入压电聚偏二氟乙烯（PVDF）致动和传感层的悬臂复合梁结构。在这种类型的传感器中，施加外部负载会导致PVDF传感层内部变形。这将产生信号，该信号通过线性二次调节器（LQR）最佳伺服控制器馈送到PVDF致动层。这继而产生平衡力以抵消外部施加的负载。结果，形成了闭合的反馈环路，即使在存在动态施加的外部负载的情况下，该反馈环路也使该高灵敏度传感器的尖端保持在其平衡位置。每当控制回路处于活动状态时，由于处于平衡位置，因此实际上提高了传感器的刚度，从而可以精确控制传感器尖端的运动，以进行精细的微操作和微装配。此外，可以通过测量平衡力来实时确定所施加的力。

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