Our Understanding of Thin Film Morphology

PAUL SUNAL

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Our Understanding of Thin Film Morphology

机译：我们对薄膜形态的理解

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The widespread uses of thin films in a variety of industries and applications (such as microlectronics) have been allowed in part by our ability to predict the morphology in an amazingly accurate and detailed manner. A number of experimental and theoretical investigators have studied thin film morphology over the past century to arrive at this technologically cozy location in our ability to nano-engineer physical vapor deposited (PVD) thin films.

机译：薄膜在各种行业和应用（例如微电子学）中的广泛使用，部分原因是我们能够以惊人的准确和详细的方式预测形态。在过去的一个世纪中，许多实验和理论研究人员研究了薄膜的形态，从而以我们对纳米物理气相沉积（PVD）薄膜进行纳米工程设计的能力到达了这个技术舒适的位置。

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《Michigan Academician》 |2000年第4期|p.345-368|共24页
作者
PAUL SUNAL;
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Our Understanding of Thin Film Morphology

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