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首页> 外文期刊>Micro & nano letters >Bias thermal stability improvement of MEMS gyroscope with quadrature motion correction and temperature self-sensing compensation
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Bias thermal stability improvement of MEMS gyroscope with quadrature motion correction and temperature self-sensing compensation

机译：具有正交运动校正和温度自感补偿MEMS陀螺MEMS陀螺仪的热稳定性改进

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摘要

Bias thermal stability of microelectromechanical system (MEMS) gyroscope is a significant performance parameter for industrial and tactical applications. The quadrature coupling motion and demodulation phase error are two main sources of bias drift. This work presents a MEMS tuning fork gyroscope with dedicated electrostatic correction combs finger structure that can be implemented to suppress the quadrature motion. By utilising a closed-loop control for the coupling stiffness, the temperature variation of quadrature motion achieves >260 times of magnitude reduction, resulting in the thermal bias drift decreased from 0.98 to 0.18 degrees/s with 5.4 times improvement over the temperature from -40 to 60 degrees C. The results indicate that the variation of the quadrature motion is the dominant factor that determines the temperature bias drift of the custom-designed gyroscope. The compensated bias stability (1 sigma) is measured to be similar to 8.6 degrees/h by using temperature self-sensing compensation technique over the whole temperature operating range, which demonstrates a considerably competitive result for the tactical-grade MEMS gyroscope.
机译：微机电系统（MEMS）陀螺的偏置热稳定性是工业和战术应用的显着性能参数。正交耦合运动和解调相位误差是偏置漂移的两个主要源。该工作介绍了具有专用静电校正梳子手指结构的MEMS调谐叉陀螺仪，其可以实现以抑制正交运动。通过利用用于耦合刚度的闭环控制，正交运动的温度变化达到> 260倍，导致热偏置漂移从0.98到0.18度降低，温度从-40的温度提高5.4倍。结果表明正交运动的变化是确定定制设计陀螺仪的温度偏置漂移的主导因素。通过在整个温度操作范围内使用温度自感补偿技术，测量补偿偏置稳定性（1Σ）与8.6度/ h相似，这证明了战术级MEMS陀螺仪的显着竞争结果。

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  • 来源
    《Micro & nano letters》 |2020年第4期|234-238|共5页
  • 作者

    Cui Jian; Zhao Qiancheng;

  • 作者单位

    Peking Univ Inst Microelect Natl Key Lab Sci & Technol Micro Nano Fabricat Beijing 100871 Peoples R China;

    Peking Univ Inst Microelect Natl Key Lab Sci & Technol Micro Nano Fabricat Beijing 100871 Peoples R China;

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