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首页> 外文期刊>Micro & Nano Letters, IET >Vertical silicon nanowire array-patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols
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Vertical silicon nanowire array-patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols

机译：垂直硅纳米线阵列模式的微悬臂谐振器，用于增强对香烟烟雾气溶胶的检测

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摘要

The fabrication and use of silicon nanowire (SiNW) array-patterned microcantilever sensors for enhancing aerosol mass detection are described. Surface modification of the cantilever is performed selectively by combining the processes of nanoimprint lithography, photolithography and inductively coupled plasma cryogenic reactive ion etching. Cylindrical wire structures of 300 nm diameter with aspect ratios of 3-7 can be realised for the current SiNWs, which can be altered depending on the nanoimprint stamp size and etching recipe. Owing to the rise in the collection surface area of the sensor provided by vertical SiNWs, an increase of aerosol sampling efficiency can be obtained during cigarette smoke exposure, which is a factor of 1.5 higher than that of a corresponding plain cantilever. This proposed structure is intended to be used as a sensor module of a personal aerosol mass detector.
机译：描述了用于增强气溶胶质量检测的硅纳米线（SiNW）阵列式微悬臂梁传感器的制造和使用。通过结合纳米压印光刻，光刻和感应耦合等离子体低温反应离子刻蚀的过程，选择性地进行悬臂的表面改性。对于当前的SiNW，可以实现长宽比为3到7的直径为300 nm的圆柱线结构，可以根据纳米压印图章的大小和蚀刻配方进行更改。由于垂直SiNW提供的传感器收集表面积的增加，在接触香烟烟雾期间可以获得气溶胶采样效率的提高，该效率比相应的普通悬臂梁高1.5倍。该提出的结构旨在用作个人气溶胶质量检测器的传感器模块。

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