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首页> 外文期刊>Micro & Nano Letters >Design and fabrication of long-focal-length microlens arrays for Shack–Hartmann wavefront sensors
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Design and fabrication of long-focal-length microlens arrays for Shack–Hartmann wavefront sensors

机译：Shack-Hartmann波前传感器的长焦距微透镜阵列的设计和制造

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摘要

Presented is a microlens array (MLA) with long focal length (millimetre range) in various structures and arrangements using thermal reflownprocess for Shack–Hartmann wavefront sensors (SHWSs). The microlens focal length is usually of the same order of the lens diameter ornseveral 100 mm. To extend the focal length, the authors made a photoresist MLA covered by polydimethysiloxane (PDMS) film on a glassnsubstrate. Since the refractive index difference between the PDMS and MLA interface is lower than that of air and the MLA interface, thenlight is less bended when passing through it and focuses in a far distance. The exerimental result shows a 235 and 135 mm diameter MLAnwith 5.27 and 1.81 mm focal lengths, which is around six times longer than the conventional thermal reflow method. Other specific focalnlengths could be realised by modifying the refractive index difference. After the long-focal-length MLA film was fabricated, it could be inte-ngrated with an image sensor to build a SHWS. The authors evaluated the performance of their sensor by measuring a progressive addition lensnwavefront aberration.
机译：展示了一种采用热重现工艺的Shack-Hartmann波前传感器（SHWS）的各种结构和布置的长焦距（毫米范围）的微透镜阵列（MLA）。微透镜的焦距通常与透镜直径的数量级相同，或者为几百毫米。为了延长焦距，作者制作了在玻璃基板上覆盖有聚二甲基硅氧烷（PDMS）膜的光刻胶MLA。由于PDMS和MLA界面之间的折射率差比空气和MLA界面的折射率差小，因此光线穿过它时弯曲少，并且聚焦在很远的距离。实验结果表明，直径235和135毫米的MLAn的焦距为5.27和1.81毫米，是传统热流方法的六倍左右。其他特定的焦距可以通过修改折射率差来实现。制作了长焦距的MLA膜后，可以将其与图像传感器集成以构建SHWS。作者通过测量渐进式附加透镜波前像差来评估其传感器的性能。

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