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Thermo-mechanical coupling and size effects in micro and nano resonators

机译:微米和纳米谐振器中的热力耦合和尺寸效应

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摘要

Existing models for thermoelastic damping consider geometric size effects only, the focus of this study is on tuning of thermoelastic damping with mechanical strain, which reduces both relaxation rate and thermal conductivity at the nanoscale. We developed a model that accounts for the contribution of tensile force and thermal conductivity in a clamped-clamped configuration nano-resonator. Experimentally measured thermal conductivity is then coupled with the model suggests the existence of a critical length scale (inversion point) below which quality factor increases with increase in thickness and vice versa. The nanoscale strain-thermal conductivity coupling is found to be most effective at and around this inversion point.
机译:现有的热弹性阻尼模型仅考虑几何尺寸效应,本研究的重点是通过机械应变调整热弹性阻尼,从而降低了纳米级的弛豫率和导热系数。我们开发了一个模型,该模型说明了在夹紧式配置的纳米谐振器中拉力和热导率的贡献。然后将实验测量的热导率与模型耦合,表明存在临界长度标尺(反转点),低于该临界值时,品质因数随厚度的增加而增加,反之亦然。发现纳米级应变-热导率耦合在此反演点及其附近最为有效。

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