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2-D Electrostatic Actuation of Microshutter Arrays

机译：微快门阵列的二维静电驱动

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Electrostatically actuated microshutter arrays consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters while maintaining their structural integrity. Mechanical and electromechanical test systems were constructed to measure the static and dynamic behavior of the microshutters. The torsional stiffness was reduced by a factor of four over initial designs without sacrificing durability. The analysis of the resonant behavior of the microshutters demonstrates that the first resonant mode is a torsional mode occurring around 3000 Hz. At low vacuum pressures, this resonant mode can be used to significantly reduce the drive voltage necessary for actuation requiring as little as 25 V. The 2-D electrostatic latching and addressing was demonstrated using both a resonant and a pulsed addressing scheme. [2015–0172]
机译：通过使用模型和实验，设计和制造了由旋转微快门（围绕扭杆旋转的快门）组成的静电驱动微快门阵列。设计迭代的重点是最小化微快门的扭转刚度，同时保持其结构完整性。构造了机械和机电测试系统以测量微快门的静态和动态行为。在不牺牲耐用性的情况下，扭转刚度比初始设计降低了四倍。对微快门的共振行为的分析表明，第一共振模式是在3000Hz附近发生的扭转模式。在低真空压力下，该谐振模式可用于显着降低仅需25 V的驱动所需的驱动电压。使用谐振和脉冲寻址方案均展示了二维静电锁存和寻址。 [2015–0172]

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